High-Precision Spot Detection of Driving Laser for Extreme Ultraviolet Lithography Light Sources

Xinpeng Li; Deyang Yu; Jin Guo; Fei Chen; Qikun Pan

doi:10.3788/CJL220686

Chinese Journal of Lasers, Volume. 50, Issue 2, 0204002(2023)

High-Precision Spot Detection of Driving Laser for Extreme Ultraviolet Lithography Light Sources

Xinpeng Li^1,2, Deyang Yu^1、*, Jin Guo¹, Fei Chen¹, and Qikun Pan¹

¹State Key Laboratory of Laser Interaction with Matter,Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences,Changchun 130033,Jilin, China

²University of Chinese Academy of Sciences,Beijing 100049, China

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Xinpeng Li, Deyang Yu, Jin Guo, Fei Chen, Qikun Pan. High-Precision Spot Detection of Driving Laser for Extreme Ultraviolet Lithography Light Sources[J]. Chinese Journal of Lasers, 2023, 50(2): 0204002

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Paper Information

Category: Measurement and metrology

Received: Mar. 21, 2022

Accepted: Jun. 22, 2022

Published Online: Dec. 5, 2022

The Author Email: Yu Deyang (yudeyang830@163.com)

DOI:10.3788/CJL220686

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology