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Journal of Semiconductors, Volume. 46, Issue 3, 030501(2025)

Broadband PZT electro-optic modulator

Peng Wang1, Hongyan Yu4, Yujun Xie1, Jie Peng1,2,3, Chengyang Zhong1,2,3, Ang Li1,2,3, Zehao Guan1,2,3, Jungan Wang4, Chen Yang4, Yu Han5, Feng Qiu4、*, and Ming Li1,2,3、**
Author Affiliations
  • 1Key Laboratory of Optoelectronic Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100190, China
  • 3School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 4Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China
  • 5Juhe Electro-optic (Hangzhou) Tech. Co. Ltd. Hangzhou 310024, China
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    [1] D V Plant, M Morsy-Osman, M Chagnon. Optical communication systems for datacenter networks. 2017 Optical Fiber Communications Conference and Exhibition (OFC), 1(2017).

    [2] A H Atabaki, S Moazeni, F Pavanello et al. Integrating photonics with silicon nanoelectronics for the next generation of systems on a chip. Nature, 556, 349(2018).

    [3] G T Reed, G Mashanovich, F Y Gardes et al. Silicon optical modulators. Nat Photonics, 4, 518(2010).

    [4] A Li, Q L Ma, Y J Xie et al. A 256 Gb/s electronic–photonic monolithically integrated transceiver in 45 nm CMOS. J Semicond, 45, 070501(2024).

    [5] W J Li, F Eltes, E Berikaa et al. Thin-film BTO-based MZMs for next-generation IMDD transceivers beyond 200 Gb/s/λ. J Light Technol, 42, 1143(2024).

    [6] Y Jo, C Mai, S Lischke et al. Modulation linearity characterization of Si ring modulators. J Light Technol, 39, 7842(2021).

    [7] G Y Chen, N X Li, J D Ng et al. Advances in lithium niobate photonics: Development status and perspectives. Adv Photonics, 4, 034003(2022).

    [8] G L Liu, H Y Yu, D S Ban et al. Highly efficient lead zirconate titanate ring modulator. APL Photonics, 9, 066111(2024).

    [9] G F Feutmba, L Da Silva, N Singh et al. High frequency characterization of PZT thin-films deposited by chemical solution deposition on SOI for integrated high speed electro-optic modulators. Opt Mater Express, 13, 2120(2023).

    [10] Y Yuan, Y W Peng, W V Sorin et al. A 5 × 200 Gb/s microring modulator silicon chip empowered by two-segment Z-shape junctions. Nat Commun, 15, 918(2024).

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    Peng Wang, Hongyan Yu, Yujun Xie, Jie Peng, Chengyang Zhong, Ang Li, Zehao Guan, Jungan Wang, Chen Yang, Yu Han, Feng Qiu, Ming Li. Broadband PZT electro-optic modulator[J]. Journal of Semiconductors, 2025, 46(3): 030501

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    Paper Information

    Category: Research Articles

    Received: Nov. 18, 2024

    Accepted: --

    Published Online: Apr. 27, 2025

    The Author Email: Feng Qiu (FQiu), Ming Li (MLi)

    DOI:10.1088/1674-4926/24110019

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology