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Journal of Semiconductors, Volume. 46, Issue 3, 030501(2025)

Broadband PZT electro-optic modulator

Peng Wang1, Hongyan Yu4, Yujun Xie1, Jie Peng1,2,3, Chengyang Zhong1,2,3, Ang Li1,2,3, Zehao Guan1,2,3, Jungan Wang4, Chen Yang4, Yu Han5, Feng Qiu4、*, and Ming Li1,2,3、**
Author Affiliations
  • 1Key Laboratory of Optoelectronic Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100190, China
  • 3School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 4Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China
  • 5Juhe Electro-optic (Hangzhou) Tech. Co. Ltd. Hangzhou 310024, China
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    Figures & Tables(4)
    (Color online) Electric field distribution of PZT modulators.

    Fig. 1. (Color online) Electric field distribution of PZT modulators.

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    (Color online) Illustration of PZT polarization.

    Fig. 2. (Color online) Illustration of PZT polarization.

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    (Color online) Schematic diagram of MZM and EO test results. (a) Schematic diagram of the MZM. (b) Modulation efficiency result (VπL = 1.3 V∙cm). (c) Measured EO bandwidth of 70 GHz. (d) Eye diagram of the PZT MZM, measured using OOK modulation with a peak-to-peak drive voltage of 3 V.

    Fig. 3. (Color online) Schematic diagram of MZM and EO test results. (a) Schematic diagram of the MZM. (b) Modulation efficiency result (VπL = 1.3 V∙cm). (c) Measured EO bandwidth of 70 GHz. (d) Eye diagram of the PZT MZM, measured using OOK modulation with a peak-to-peak drive voltage of 3 V.

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    (Color online) Schematic diagram of MRM and EO test results. (a) Schematic diagram of the MRM. (b) Modulation efficiency result (VπL = 0.56 V∙cm). (c) Measured EO bandwidth of 53 GHz. (d) Eye diagram of the PZT MRM, measured using OOK modulation with a peak-to-peak drive voltage of 3 V.

    Fig. 4. (Color online) Schematic diagram of MRM and EO test results. (a) Schematic diagram of the MRM. (b) Modulation efficiency result (VπL = 0.56 V∙cm). (c) Measured EO bandwidth of 53 GHz. (d) Eye diagram of the PZT MRM, measured using OOK modulation with a peak-to-peak drive voltage of 3 V.

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    Peng Wang, Hongyan Yu, Yujun Xie, Jie Peng, Chengyang Zhong, Ang Li, Zehao Guan, Jungan Wang, Chen Yang, Yu Han, Feng Qiu, Ming Li. Broadband PZT electro-optic modulator[J]. Journal of Semiconductors, 2025, 46(3): 030501

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    Paper Information

    Category: Research Articles

    Received: Nov. 18, 2024

    Accepted: --

    Published Online: Apr. 27, 2025

    The Author Email: Feng Qiu (FQiu), Ming Li (MLi)

    DOI:10.1088/1674-4926/24110019

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology