Piezoelectrics & Acoustooptics, Volume. 44, Issue 1, 111(2022)
Control Method of Wafer Test Process Based on GRU Neural Network
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GUO Daizong, HU Hong. Control Method of Wafer Test Process Based on GRU Neural Network[J]. Piezoelectrics & Acoustooptics, 2022, 44(1): 111
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Received: Nov. 1, 2021
Accepted: --
Published Online: Mar. 16, 2022
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