Journal of Applied Optics, Volume. 46, Issue 2, 451(2025)

Experimental study of color CCD detector damage by nanosecond laser irradiation

Minghui ZUO, Cuiheng ZHANG, Pin NIE, Di WANG, and Zhi WEI*
Author Affiliations
  • College of Physics, Changchun University of Science and Technology, Changchun 130022, China
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    Figures & Tables(8)
    Cross-section diagram of color silicon-based CCD detector structure
    Working principle diagram of CCD detector
    Experimental device diagram
    Damage output, damage morphology and damage depth diagrams of CCD detector at power density of 2.675×105 W/cm2
    Damage output, damage morphology and damage depth diagrams of CCD detector at power density of 3.534×106 W/cm2
    Damage output, damage morphology and damage depth diagrams of CCD detector at power density of 4.526×106 W/cm2
    Damage output, damage morphology and damage depth diagrams of CCD detector at power density of 5.926×106 W/cm2
    • Table 1. Multilayer structure of CCD detector

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      Table 1. Multilayer structure of CCD detector

      结构厚度/μm功能
      微透镜3聚焦入射光
      分色滤色片9分色
      Si3N42增厚层
      遮光铝膜1遮光
      多晶硅电极0.7控制电荷
      SiO20.2绝缘层
      P+ 区域0.4产生电荷
      N型光敏区0.7光电转换
      P-well区4.4电荷积累
      N型硅基底200机械支撑
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    Minghui ZUO, Cuiheng ZHANG, Pin NIE, Di WANG, Zhi WEI. Experimental study of color CCD detector damage by nanosecond laser irradiation[J]. Journal of Applied Optics, 2025, 46(2): 451

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    Paper Information

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    Received: Dec. 11, 2024

    Accepted: --

    Published Online: May. 13, 2025

    The Author Email: Zhi WEI (魏智)

    DOI:10.5768/JAO202546.0207006

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