Chinese Journal of Lasers, Volume. 41, Issue 4, 416003(2014)
Optical Design of Lithography Projective Lens with Variable Total Track
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Cai Yanmin, Wang Xiangzhao, Huang Huijie. Optical Design of Lithography Projective Lens with Variable Total Track[J]. Chinese Journal of Lasers, 2014, 41(4): 416003
Paper Information
Category: Optical Design and Fabrication
Received: Oct. 8, 2013
Accepted: --
Published Online: Mar. 31, 2014
The Author Email: Yanmin Cai (caiyanmin@163.com)
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