Acta Optica Sinica, Volume. 28, Issue s2, 378(2008)
Crystallization of Amorphous Hydrogenated SiC Films by KrF Excimer Laser Annealing
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Crystallization of Amorphous Hydrogenated SiC Films by KrF Excimer Laser Annealing[J]. Acta Optica Sinica, 2008, 28(s2): 378
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