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Photonics Research, Volume. 13, Issue 5, 1313(2025)

Advancing photonic device capabilities via femtosecond laser modification of LPCVD-SiN microring resonator characteristics

Jia Du1, Weixiao Xu1,2,3, Runwei Zhou1,2, Xiao Chen1, Ting Li1, Xiongping Bao1,2, Hong Wang1,4, Weibiao Chen1,2,3, and Libing Zhou1,2、*
Author Affiliations
  • 1Wangzhijiang Innovation Center for Laser, Aerospace Laser Technology and System Department, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China
  • 4Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, China
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    Jia Du, Weixiao Xu, Runwei Zhou, Xiao Chen, Ting Li, Xiongping Bao, Hong Wang, Weibiao Chen, Libing Zhou, "Advancing photonic device capabilities via femtosecond laser modification of LPCVD-SiN microring resonator characteristics," Photonics Res. 13, 1313 (2025)

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    Paper Information

    Category: Optical and Photonic Materials

    Received: Nov. 26, 2024

    Accepted: Mar. 1, 2025

    Published Online: Apr. 30, 2025

    The Author Email: Libing Zhou (lbzhou@siom.ac.cn)

    DOI:10.1364/PRJ.550226

    CSTR:32188.14.PRJ.550226

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology