Researching | Energy-Controllable Femtosecond Laser Fabrication Based on Spatial Light Modulator

Chinese Journal of Lasers, Volume. 44, Issue 1, 102008(2017)

Energy-Controllable Femtosecond Laser Fabrication Based on Spatial Light Modulator

Rao Shenglong^*, Wu Peichao, Zhang Chenchu, Hu Yanlei, Yang Liang, Lao Zhaoxin, and Wu Dong

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References(13)

[1] Mourou G A, Barty C, Perry M D. Ultrahigh-intensity laser: physics of the extreme on a tabletop[J]. Physics Today, 51, 22-28(1998). http://scitation.aip.org/content/aip/magazine/physicstoday/article/51/1/10.1063/1.882131

[2] Sugioka K, Hanada Y, Midorikawa K. Three-dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips[J]. Laser and Photonics Reviews, 4, 386-400(2010). http://onlinelibrary.wiley.com/doi/10.1002/lpor.200810074/full

[3] Gattass R R, Mazur E. Femtosecond laser micromachining in transparent materials[J]. Nature Photonics, 2, 219-225(2008). http://www.nature.com/nphoton/journal/v2/n4/abs/nphoton.2008.47.html

[4] Chen Q D, Wu D, Niu L G et al. Phase lenses and mirrors created by laser micronanofabrication via two-photon photopolymerization[J]. Applied Physics Letters, 91, 171105(2007). http://scitation.aip.org/content/aip/journal/apl/91/17/10.1063/1.2798505

[5] Zhang C C, Hu Y L, Li J W et al. An improved multi-exposure approach for high quality holographic femtosecond laser patterning[J]. Applied Physics Letters, 105, 221104(2014). http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6971043

[6] Xia H, Wang J, Tian Y et al. Ferrofluids for fabrication of remotely controllable micro-nanomachines by two-photon polymerization[J]. Advanced Materials, 22, 3204-3207(2010). http://europepmc.org/abstract/MED/20603886

[7] Zhu W, Li J X, Leong Y J et al. 3D-printed artificial microfish[J]. Advanced Materials, 27, 4411-4417(2015). http://onlinelibrary.wiley.com/doi/10.1002/adma.201501372/pdf

[8] Wang J, Xia H, Xu B B et al. Remote manipulation of micronanomachines containing magnetic nanoparticles[J]. Optics Letters, 34, 581-583(2009). http://www.opticsinfobase.org/abstract.cfm?uri=ol-34-5-581

[9] Lim T W, Son Y, Jeong Y J et al. Three-dimensionally crossing manifold micro-mixer for fast mixing in a short channel length[J]. Lab on a Chip, 11, 100-103(2011). http://www.ncbi.nlm.nih.gov/pubmed/20938497

[10] Kawata S, Sun H B, Tanaka T et al. Finer features for functional microdevices[J]. Nature, 412, 697-698(2001). http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=VIRT01000004000009000030000001&idtype=cvips&gifs=Yes

[11] Matsuo S, Juodkazis S, Misawa H. Femtosecond laser microfabrication of periodic structures using a microlens array[J]. Applied Physics A, 80, 683-686(2005). http://link.springer.com/article/10.1007/s00339-004-3108-x

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[13] Takahashi H, Hasegawa S, Takita A et al. Sparse-exposure technique in holographic two-photon polymerization[J]. Optics Express, 16, 16592-16599(2008). http://www.ncbi.nlm.nih.gov/pubmed/18852768

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Rao Shenglong, Wu Peichao, Zhang Chenchu, Hu Yanlei, Yang Liang, Lao Zhaoxin, Wu Dong. Energy-Controllable Femtosecond Laser Fabrication Based on Spatial Light Modulator[J]. Chinese Journal of Lasers, 2017, 44(1): 102008

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Paper Information

Special Issue:

Received: Aug. 26, 2016

Accepted: --

Published Online: Jan. 10, 2017

The Author Email: Shenglong Rao (shenglon@mail.ustc.edu.cn)

DOI:10.3788/CJL201744.0102008

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology