Chinese Journal of Lasers, Volume. 44, Issue 1, 102008(2017)

Energy-Controllable Femtosecond Laser Fabrication Based on Spatial Light Modulator

Rao Shenglong*, Wu Peichao, Zhang Chenchu, Hu Yanlei, Yang Liang, Lao Zhaoxin, and Wu Dong
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  • [in Chinese]
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    Figures & Tables(5)
    Schematic of femtosecond TPP fabrication system
    Schematic of Fourier computer generated holography
    Holograms of blazed gratings. (a)(b) Blazed grating with different periods; (c)(d) blazed grating with different active zones
    SEM images of microstructures fabricated with computer generated holograms. (a)(b)(c) Corresponding to the blazed grating periods of 540 pixel, 1080 pixel and 2160 pixel; results fabricated (d) without energy control and (e) with real-time energy control
    Schematic and microscopic images of annular microstructures fabricated with real-time energy control. (a) Schematic of annular structures fabricated with different a values; (b)(c)(d) microscopic images captured at focal plane, focal plane 1 mm to the focal plane and 2 mm to the focal plane, respectively
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    Rao Shenglong, Wu Peichao, Zhang Chenchu, Hu Yanlei, Yang Liang, Lao Zhaoxin, Wu Dong. Energy-Controllable Femtosecond Laser Fabrication Based on Spatial Light Modulator[J]. Chinese Journal of Lasers, 2017, 44(1): 102008

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    Paper Information

    Special Issue:

    Received: Aug. 26, 2016

    Accepted: --

    Published Online: Jan. 10, 2017

    The Author Email: Shenglong Rao (shenglon@mail.ustc.edu.cn)

    DOI:10.3788/CJL201744.0102008

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