Chinese Journal of Lasers, Volume. 44, Issue 1, 102008(2017)
Energy-Controllable Femtosecond Laser Fabrication Based on Spatial Light Modulator
Fig. 3. Holograms of blazed gratings. (a)(b) Blazed grating with different periods; (c)(d) blazed grating with different active zones
Fig. 4. SEM images of microstructures fabricated with computer generated holograms. (a)(b)(c) Corresponding to the blazed grating periods of 540 pixel, 1080 pixel and 2160 pixel; results fabricated (d) without energy control and (e) with real-time energy control
Fig. 5. Schematic and microscopic images of annular microstructures fabricated with real-time energy control. (a) Schematic of annular structures fabricated with different a values; (b)(c)(d) microscopic images captured at focal plane, focal plane 1 mm to the focal plane and 2 mm to the focal plane, respectively
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Rao Shenglong, Wu Peichao, Zhang Chenchu, Hu Yanlei, Yang Liang, Lao Zhaoxin, Wu Dong. Energy-Controllable Femtosecond Laser Fabrication Based on Spatial Light Modulator[J]. Chinese Journal of Lasers, 2017, 44(1): 102008
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Received: Aug. 26, 2016
Accepted: --
Published Online: Jan. 10, 2017
The Author Email: Shenglong Rao (shenglon@mail.ustc.edu.cn)