Chinese Journal of Lasers, Volume. 44, Issue 1, 102008(2017)

Energy-Controllable Femtosecond Laser Fabrication Based on Spatial Light Modulator

Rao Shenglong*, Wu Peichao, Zhang Chenchu, Hu Yanlei, Yang Liang, Lao Zhaoxin, and Wu Dong
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    To address the problems of relative movement control of laser and samples and the focus energy control in the femtosecond laser micro-nanofabrication technologies, a new method, which is based on dynamically loading computer-generated holograms through a liquid crystal-on-silicon spatial light modulator, is proposed to simultaneously control the position and energy of the focal spot. By loading superposed blazed grating holograms, two-dimensional structure fabrication can be achieved by single point scanning without platform movement. Further, by controlling the active zone in the hologram, the incident beam energy can be modulated, and thus the lattice morphology can be controlled. Taking advantages of this method, we have fabricated ring structures successfully, and got the corresponding effect under an optical microscope. This proves that the method is feasible in the field of femtosecond laser micro-nanofabrication.

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    Rao Shenglong, Wu Peichao, Zhang Chenchu, Hu Yanlei, Yang Liang, Lao Zhaoxin, Wu Dong. Energy-Controllable Femtosecond Laser Fabrication Based on Spatial Light Modulator[J]. Chinese Journal of Lasers, 2017, 44(1): 102008

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    Paper Information

    Special Issue:

    Received: Aug. 26, 2016

    Accepted: --

    Published Online: Jan. 10, 2017

    The Author Email: Shenglong Rao (shenglon@mail.ustc.edu.cn)

    DOI:10.3788/CJL201744.0102008

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