Chinese Journal of Lasers, Volume. 36, Issue s2, 223(2009)
Measurement of Four-Degree-of-Freedom Geometric Errors of a Linear Stage Based on Telescope System
[1] [1] Chen Qianghua,Wu Jian,Yin Chunyong. Long range straightness/coaxiality measurement system using dual-frequency laser[J]. Chinese J. Lasers,2002,A29(7):625-630
[2] [2] Zhao Hui,Pu Zhaobang,Liu Guodong. High precision straightness device based on double frequency laser interference technique[J]. Chinese J. Lasers,2001,A28(7):637-640
[3] [3] Kam C. Lau,Yuanqen Liu. Five-axis/Six-axis Laser Measuring System[P].US:006049377,2000204211
[4] [4] Jong-Ahn Kim,E. W. Bae,S. H. Kim et al.. Design methods for six-degree-of-freedom displacement measurement systems using cooperative targets[J]. Precision Engineering,2002,26(1):99-104
[5] [5] Chung Sungchong,Zhou Fuqiang,Ye Shenghua. Six degrees-of-freedom error measuring device for linear motion of slides[C]. Proc. of ASPE Annual Meeting,1998,18:445-449
[6] [6] He Jin,Zuo Baojun,Fan Zhigang et al.. Measurement of four degree-of-freedom displacement[J]. Chinese J . Lasers,2003,30(supplement):137-139
[7] [7] J. Kumar Pavuluri,et al.. A high precision,six-degree-of-freedom single sidled,noncontact,optical sensor suitable for assembly automation[C]. Proc. of National Science Foundation Design and Manufacturing Conference,Charlotte,NC,1993,1613-1619
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement of Four-Degree-of-Freedom Geometric Errors of a Linear Stage Based on Telescope System[J]. Chinese Journal of Lasers, 2009, 36(s2): 223
Category: Measurement and metrology
Received: --
Accepted: --
Published Online: Dec. 30, 2009
The Author Email: (kerqin@mail.ustc.edu.cn)