Chinese Journal of Lasers, Volume. 36, Issue s2, 223(2009)
Measurement of Four-Degree-of-Freedom Geometric Errors of a Linear Stage Based on Telescope System
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement of Four-Degree-of-Freedom Geometric Errors of a Linear Stage Based on Telescope System[J]. Chinese Journal of Lasers, 2009, 36(s2): 223
Category: Measurement and metrology
Received: --
Accepted: --
Published Online: Dec. 30, 2009
The Author Email: (kerqin@mail.ustc.edu.cn)