Laser & Optoelectronics Progress, Volume. 60, Issue 23, 2314006(2023)

Fabrication of Infrared Micro-Optical Components Using Femtosecond Laser

Yahua Niu1, Shengzhi Sun1, Xiaofeng Liu2、*, and Jianrong Qiu3
Author Affiliations
  • 1Laboratory of Infrared Materials and Devices, The Research Institute of Advanced Technologies, Ningbo University, Ningbo 315211, Zhejiang, China
  • 2State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, Zhejiang, China
  • 3State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, Zhejiang, China
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    Figures & Tables(20)
    Flow chart of SLA[8]
    Schematic diagram of femtosecond laser processing
    Preparation methods of microlens. (a) Schematic diagram of femtosecond laser-assisted dry etching[24]; (b) schematic diagram of femtosecond laser-assisted wet etching[25]
    Array of microlenses, virtual focal spots and virtual images of the letters “IP”[26]
    Schematic of the fabrication process[27]. (a) An array of laser-exposed craters is produced on BK7 glass by laser irradiation; (b) craters are treated by ultrasonic-assisted HF etching; (c) concave microlens arrays with smooth surfaces are formed; (d) precision glass molding process; (e) separate the chalcogenide glass (ChG) from the mold; (f) convex ChG microlens arrays
    Preparation of concave lens and compound eye. (a) Fabrication scheme of a sapphire concave microlens by DE-FsLM; (b) schematic diagram of fabrication of sapphire concave compound eye template and K9 glass compound eye[33]
    Topography diagram of ACE components. (a) Surface morphology of ACE component; (b) cross section shape of shell component[34]
    Schematic diagram of the device[36]
    Fabrication schematic of cladding waveguides and splitters[42]
    Non-Abelian braiding of three modes[44]. (a) Schematic diagram of a G2G1 braiding configuration; (b) modulation profiles of the coupling coefficients; (c) experimental results of the G2G1 braiding; (d) light-diffraction patterns at the output facet of the G1G2 braiding; (e) G2G1 braiding coincidence rate; (f) G1G2 braiding coincidence rate
    Preparation of photonic crystals in silica and resin[45]. (a) Reconstructed image of the 2D triangular PhC in silica; (b) 1D, 2D and 3D structures fabricated in resin; (c) optical microscope images of different atomic planes in laser micro-fabricated diamond photonic lattice in glass
    Spatial filtering diagram. (a) Illustration of broadband spatial filtering in chirped PhCs; (b) principal scheme of direct laser writing using Bessel beams[46]
    Schematic diagram of the 3D NPC fabrication realized through femtosecond laser engineering[47]
    Experimental results. (a) Reconstruction of a star pattern at SH wave; (b) output power and pattern at SH wave when tuning the fundamental wavelength; (c) experimental results of three-channel QPM-division multiplexing holography[48]
    Schematic representation of a chirped FBG[50]
    Etching schematic and fiber cross section. (a) During the point-by-point FBGs etching process, the femtosecond laser pulse focusing diagram; (b) transparent ferrule channel traction coating fiber schematic diagram[53]; (c) fiber cross-section geometry and bending calculation parameters
    Schematic of experimental setup used to tension the LPFG[55]
    Morphologies of grating fabricated by different methods[56]. (a) Bare fiber writing; (b) refractive index matching liquid method; (c) slit method; (d) reflectance spectra of the last two FBGs; (e) grating morphologies (fabricated by refractive index method) observed at different angles
    Inscription strategy for the MCF[57]. (a) (b) Laser focus scans across the upper core; (c) fiber is rotated; (d) inscription is repeated; (e) all cores are structured
    Microscope photographs of HLFBGs[58]. (a) Cross-section of the fiber; (b) top view (parallel to the laser beam); (c) side view (perpendicular to the laser beam)
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    Yahua Niu, Shengzhi Sun, Xiaofeng Liu, Jianrong Qiu. Fabrication of Infrared Micro-Optical Components Using Femtosecond Laser[J]. Laser & Optoelectronics Progress, 2023, 60(23): 2314006

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Nov. 22, 2022

    Accepted: Jan. 13, 2023

    Published Online: Dec. 8, 2023

    The Author Email: Xiaofeng Liu (xfliu@zju.edu.cn)

    DOI:10.3788/LOP223127

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