Researching | Fabrication of Infrared Micro-Optical Components Using Femtosecond Laser

Laser & Optoelectronics Progress, Volume. 60, Issue 23, 2314006(2023)

Fabrication of Infrared Micro-Optical Components Using Femtosecond Laser

Yahua Niu¹, Shengzhi Sun¹, Xiaofeng Liu^2、*, and Jianrong Qiu³

Author Affiliations

¹Laboratory of Infrared Materials and Devices, The Research Institute of Advanced Technologies, Ningbo University, Ningbo 315211, Zhejiang, China

²State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, Zhejiang, China

³State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, Zhejiang, China

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Yahua Niu, Shengzhi Sun, Xiaofeng Liu, Jianrong Qiu. Fabrication of Infrared Micro-Optical Components Using Femtosecond Laser[J]. Laser & Optoelectronics Progress, 2023, 60(23): 2314006

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Paper Information

Category: Lasers and Laser Optics

Received: Nov. 22, 2022

Accepted: Jan. 13, 2023

Published Online: Dec. 8, 2023

The Author Email: Xiaofeng Liu (xfliu@zju.edu.cn)

DOI:10.3788/LOP223127

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology