Optics and Precision Engineering, Volume. 30, Issue 15, 1836(2022)
Interference lithography of space-variant grating structures by phase modulation
Figures & Tables(7)
Fig. 1. Structural dimensions of phase element deduced by annular segment grating
Fig. 2. Phase element with circular and annular space-variant structures and its corresponding light fields simulation
Fig. 3. Measuring result of orientation-variant grating structure in 'circle+single annulus' area
Fig. 4. Measuring result of orientation and period-variant grating structure in 'circle+double annulus' area
Fig. 5. Cause and influence of light field position deviation in imaging plane
Table 1. Structural parameters of oriented variant phase elements
View tableView in ArticleTable 1. Structural parameters of oriented variant phase elements
相位元件 圆（环）心极坐标 内径/mm 外径/mm 光栅取向/（°） 周期/μm 圆形幅面光栅 （1.775，0°），（1.775，180°） - 0.9 90 10 环形幅面光栅 （1.775，90°），（17 752，-90°） 1 1.511 0
Table 2. Structural parameters of oriented and cyclical variant phase element
View tableView in ArticleTable 2. Structural parameters of oriented and cyclical variant phase element
相位元件 圆（环）心极坐标 内径/mm 外径/mm 光栅取向/（°） 周期/μm 圆形幅面光栅 （1.775，0°），（1.775，180°） - 0.5 0 10 内环幅面光栅 （1.972，-55°），（1 972，125°） 0.55 0.95 125 9 外环幅面光栅 （2.218，55°），（2.218，-125°） 1 1.31 235 8
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Chang LU, Fengchuan XU, Yishen XU, Linsen CHEN, Yan YE. Interference lithography of space-variant grating structures by phase modulation[J]. Optics and Precision Engineering, 2022, 30(15): 1836
Paper Information
Category: Design，Fabrication and Application of Planar Optical Elements
Received: Mar. 29, 2022
Accepted: --
Published Online: Sep. 7, 2022
The Author Email: Yan YE (yanye@suda.edu.cn)
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