Photonics Research, Volume. 8, Issue 11, 1662(2020)

Hybrid nano-scale Au with ITO structure for a high-performance near-infrared silicon-based photodetector with ultralow dark current

Xinxin Li1,2,3, Zhen Deng1,3,4、*, Jun Li1,3, Yangfeng Li1,3, Linbao Guo1,2,3, Yang Jiang1,3, Ziguang Ma1,3, Lu Wang1,3, Chunhua Du1,3,4, Ying Wang5, Qingbo Meng1,3, Haiqiang Jia1,3,6, Wenxin Wang1,3,6, Wuming Liu1, and Hong Chen1,3,6,7
Author Affiliations
  • 1Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Center of Materials and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 4The Yangtze River Delta Physics Research Center, Liyang 213000, China
  • 5Department of Physics, School of Science, Beijing Jiaotong University, Beijing 100044, China
  • 6Songshan Lake Materials Laboratory, Dongguan 523808, China
  • 7e-mail: hchen@iphy.ac.cn
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    References(42)

    [1] D. Prather, S. Shi, J. Murakowski, G. Schneider, A. Sharkawy, C. Chen, B. Miao. Silicon-Based Photonic Crystal Structures: From Design to Realization, 47-93(2008).

    [23] S. Sze. Physics of Semiconductor Devices(1981).

    [35] X. Xu, Z. Liu, Y. Wang. Step-directed deposition of Au nanostructures by electron beam evaporation. J. Rare Earth, 22, 141-144(2004).

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    [1] Hao Ma, Yuanan Zhao, Yuchen Shao, Yafei Lian, Weili Zhang, Guohang Hu, Yuxin Leng, Jianda Shao, "Principles to tailor the saturable and reverse saturable absorption of epsilon-near-zero material," Photonics Res. 9, 678 (2021)

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    Xinxin Li, Zhen Deng, Jun Li, Yangfeng Li, Linbao Guo, Yang Jiang, Ziguang Ma, Lu Wang, Chunhua Du, Ying Wang, Qingbo Meng, Haiqiang Jia, Wenxin Wang, Wuming Liu, Hong Chen, "Hybrid nano-scale Au with ITO structure for a high-performance near-infrared silicon-based photodetector with ultralow dark current," Photonics Res. 8, 1662 (2020)

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    Paper Information

    Category: Silicon Photonics

    Received: May. 25, 2020

    Accepted: Aug. 19, 2020

    Published Online: Oct. 10, 2020

    The Author Email: Zhen Deng (zhen.deng@iphy.ac.cn)

    DOI:10.1364/PRJ.398450

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