Hybrid nano-scale Au with ITO structure for a high-performance near-infrared silicon-based photodetector with ultralow dark current

Xinxin Li; Zhen Deng; Jun Li; Yangfeng Li; Linbao Guo; Yang Jiang; Ziguang Ma; Lu Wang; Chunhua Du; Ying Wang; Qingbo Meng; Haiqiang Jia; Wenxin Wang; Wuming Liu; Hong Chen

doi:10.1364/PRJ.398450

Photonics Research, Volume. 8, Issue 11, 1662(2020)

Hybrid nano-scale Au with ITO structure for a high-performance near-infrared silicon-based photodetector with ultralow dark current

Xinxin Li^1,2,3, Zhen Deng^1,3,4、*, Jun Li^1,3, Yangfeng Li^1,3, Linbao Guo^1,2,3, Yang Jiang^1,3, Ziguang Ma^1,3, Lu Wang^1,3, Chunhua Du^1,3,4, Ying Wang⁵, Qingbo Meng^1,3, Haiqiang Jia^1,3,6, Wenxin Wang^1,3,6, Wuming Liu¹, and Hong Chen^1,3,6,7

Author Affiliations

¹Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China

²University of Chinese Academy of Sciences, Beijing 100049, China

³Center of Materials and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

⁴The Yangtze River Delta Physics Research Center, Liyang 213000, China

⁵Department of Physics, School of Science, Beijing Jiaotong University, Beijing 100044, China

⁶Songshan Lake Materials Laboratory, Dongguan 523808, China

⁷e-mail: hchen@iphy.ac.cn

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Xinxin Li, Zhen Deng, Jun Li, Yangfeng Li, Linbao Guo, Yang Jiang, Ziguang Ma, Lu Wang, Chunhua Du, Ying Wang, Qingbo Meng, Haiqiang Jia, Wenxin Wang, Wuming Liu, Hong Chen, "Hybrid nano-scale Au with ITO structure for a high-performance near-infrared silicon-based photodetector with ultralow dark current," Photonics Res. 8, 1662 (2020)

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Paper Information

Category: Silicon Photonics

Received: May. 25, 2020

Accepted: Aug. 19, 2020

Published Online: Oct. 10, 2020

The Author Email: Zhen Deng (zhen.deng@iphy.ac.cn)

DOI:10.1364/PRJ.398450

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