Chinese Journal of Lasers, Volume. 42, Issue 11, 1108001(2015)
Measurement Method of Film Parameters of Metal Based on Imaging Ellipsometry and Surface-Plasmon Resonance
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Hu Shiyu, Zeng Aijun, Gu Liyuan, Huang Huijie, Hu Guohang, He Hongbo. Measurement Method of Film Parameters of Metal Based on Imaging Ellipsometry and Surface-Plasmon Resonance[J]. Chinese Journal of Lasers, 2015, 42(11): 1108001
Category: Measurement and metrology
Received: May. 4, 2015
Accepted: --
Published Online: Sep. 24, 2022
The Author Email: Shiyu Hu (janexf0729@sina.cn)