Chinese Journal of Lasers, Volume. 42, Issue 11, 1108001(2015)

Measurement Method of Film Parameters of Metal Based on Imaging Ellipsometry and Surface-Plasmon Resonance

Hu Shiyu1,2、*, Zeng Aijun1,2, Gu Liyuan1,2, Huang Huijie1,2, Hu Guohang1,2, and He Hongbo1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(15)

    [1] [1] H Zhu, L Liu, Y Wen, et al.. High-precision system for automatic null ellipsometric measurement[J]. Appl Opt, 2002, 41(22): 4536- 4540.

    [2] [2] A -H Liu, P C Wayner, J L Plawsky. Image scanning ellipsometry for measuring nonuniform film thickness profiles[J]. Appl Opt, 1994, 33(7): 1223-1229.

    [3] [3] D Nec?as , I Ohlídal, D Franta, et al.. Assessment of non-uniform thin films using spectroscopic ellipsometry and imaging spectroscopic reflectometry[J]. Thin Solid Films, 2014, 571: 573-578.

    [4] [4] Wu Suyong, Long Xingwu, Yang Kaiyong. Technique to minimize the characterization deviations of optical parameters of thin films caused by ellipsometric measurement systematic errors[J]. Acta Optica Sinica, 2012, 32(6): 0631001.

    [5] [5] J C Comfort, F K Urban, D Barton, An algorithm for analyzing ellipsometric data taken with multiple angles of incidence[J]. Thin Solid Films, 1996, 290-291: 51-56.

    [6] [6] D Charlot, A Maruani. Ellipsometric data processing: an efficient method and an analysis of the relative errors[J]. Appl Opt, 1985, 24 (20): 3368-3373.

    [7] [7] S Bosch, F Monzonis, E Masetti. Ellipsometric methods for absorbing layers: a modified downhill simplex algorithm[J]. Thin Solid Films, 1996, 289(1-2): 54-58.

    [8] [8] G Cormier, R Boudreau. Genetic algorithm for ellipsometric data inversion of absorbing layers[J]. J Opt Soc Am A, 2000, 17(1): 129-134.

    [9] [9] M F Tabet, W A McGahan. Use of artificial neural networks to predict thickness and optical constants of thin films from reflectance data[J]. Thin Solid Films, 2000, 370(1):122-127.

    [10] [10] X Wang, K -P Chen, M Zhao, et al.. Refractive index and dielectric constant transition of ultra-thin gold from cluster to film[J]. Opt Express, 2010, 18(24): 24859-24867.

    [11] [11] Y P Bliokh, R Vander, S G Lipson, et al.. Visualization of the complex refractive index of a conductor by frustrated total internal reflection[J]. Appl Phys Lett, 2006, 89(2): 021908.

    [12] [12] hen Qianghua, Luo Huifu, Wang Sumei, et al.. Measurement of air refractive index based on surface plasmon resonance and phase detection by dual-frequency laser interferometry[J]. Chinese J Lasers, 2013, 40(1): 0108001.

    [13] [13] Liu Yu, Zhang Haitao, Xu Shuping, et al.. Study on the effect of refractive index and metal film thickness on surface plasmon resonance field enhanced surface-enhanced raman scattering[J]. Chinese J Lasers, 2013, 40(12): 1207001.

    [14] [14] Iwata T, Mizutani Y. Ellipsometric measurement technique for a modified Otto configuration used for observing surface-plasmon resonance[J]. Opt Express, 2010, 18(14): 14480-14487.

    [15] [15] Kaneoka Y, Nishigaki K, Mizutani Y, et al.. Precise measurement of the thickness of a dielectric layer on a metal surface by use of a modified Otto optical configuration[J]. International Journal of Optomechatronics, 2014, 9(1): 1-14.

    Tools

    Get Citation

    Copy Citation Text

    Hu Shiyu, Zeng Aijun, Gu Liyuan, Huang Huijie, Hu Guohang, He Hongbo. Measurement Method of Film Parameters of Metal Based on Imaging Ellipsometry and Surface-Plasmon Resonance[J]. Chinese Journal of Lasers, 2015, 42(11): 1108001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Measurement and metrology

    Received: May. 4, 2015

    Accepted: --

    Published Online: Sep. 24, 2022

    The Author Email: Shiyu Hu (janexf0729@sina.cn)

    DOI:10.3788/cjl201542.1108001

    Topics