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Chinese Journal of Lasers, Volume. 42, Issue 11, 1108001(2015)

Measurement Method of Film Parameters of Metal Based on Imaging Ellipsometry and Surface-Plasmon Resonance

Hu Shiyu1,2、*, Zeng Aijun1,2, Gu Liyuan1,2, Huang Huijie1,2, Hu Guohang1,2, and He Hongbo1,2
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    Hu Shiyu, Zeng Aijun, Gu Liyuan, Huang Huijie, Hu Guohang, He Hongbo. Measurement Method of Film Parameters of Metal Based on Imaging Ellipsometry and Surface-Plasmon Resonance[J]. Chinese Journal of Lasers, 2015, 42(11): 1108001

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    Paper Information

    Category: Measurement and metrology

    Received: May. 4, 2015

    Accepted: --

    Published Online: Sep. 24, 2022

    The Author Email: Shiyu Hu (janexf0729@sina.cn)

    DOI:10.3788/cjl201542.1108001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology