Chinese Journal of Lasers, Volume. 42, Issue 11, 1108001(2015)

Measurement Method of Film Parameters of Metal Based on Imaging Ellipsometry and Surface-Plasmon Resonance

Hu Shiyu1,2、*, Zeng Aijun1,2, Gu Liyuan1,2, Huang Huijie1,2, Hu Guohang1,2, and He Hongbo1,2
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  • 2[in Chinese]
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    A measurement method of film parameters of metal based on imaging ellipsometry and surface-plasmon resonance is presented. p polarized light is applied to generate surface-plasmon resonance effect at the interface of metal film and air in layout of imaging ellipsometry. The influence of back light is avoided by s polarized light which can′ t lead to surface- plasmon resonance effect. Then the normalized reflectance profile along the perpendicular direction of absorption ring of surface- plasmon resonance is obtained. We measure metal film parameters by numerical fitting the reflectance profile along long axis of the elliptical fringe. This method is not necessary to solve the transcendental equation and data processing is simple and fast. The experimental result with this method is coincident with that of standard ellipsometer, which verifies the validity of this measurement method.

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    Hu Shiyu, Zeng Aijun, Gu Liyuan, Huang Huijie, Hu Guohang, He Hongbo. Measurement Method of Film Parameters of Metal Based on Imaging Ellipsometry and Surface-Plasmon Resonance[J]. Chinese Journal of Lasers, 2015, 42(11): 1108001

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    Paper Information

    Category: Measurement and metrology

    Received: May. 4, 2015

    Accepted: --

    Published Online: Sep. 24, 2022

    The Author Email: Shiyu Hu (janexf0729@sina.cn)

    DOI:10.3788/cjl201542.1108001

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