Chinese Journal of Liquid Crystals and Displays, Volume. 40, Issue 8, 1100(2025)

Review of low-temperature polycrystalline silicon oxide display driving technology and hydrogen diffusion behavior

Xi ZHANG1, Bin LIU1, Shuo ZHANG1, Congyang WEN1, Qi YAO1,2, Jian GUO2, Ce NING2, Guangcai YUAN2, Feng WANG1, and Zhinong YU1、*
Author Affiliations
  • 1Beijing Engineering Research Center of Mixed Reality and Advanced Display, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
  • 2BOE Technology Group Co. Ltd., Beijing 100176, China
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    Low temperature polycrystalline oxide (LTPO) display technology is a new integrated display technology that integrates low temperature polycrystalline silicon (LTPS) and metal oxide semiconductors (MOS) to achieve high performance and low power consumption display solutions. During the LTPO integration process, hydrogen may diffuse from the low-temperature polysilicon layer to the metal oxide layer, resulting in device threshold voltage drift and deterioration of stability, affecting display product performance. The differences of hydrogen in LTPS and MOS devices and the effects of hydrogen on MOS devices are discussed in detail. Two types of hydrogen blocking methods for MOS devices are summarized: using different dielectric layers and ion doping technology. In addition, the paper also arranges the hydrogen barrier for LTPO devices to improve the stability and reliability of LTPO devices. Finally, the wider application of LTPO technology in the field of high performance display through hydrogen blocking is prospected.

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    Xi ZHANG, Bin LIU, Shuo ZHANG, Congyang WEN, Qi YAO, Jian GUO, Ce NING, Guangcai YUAN, Feng WANG, Zhinong YU. Review of low-temperature polycrystalline silicon oxide display driving technology and hydrogen diffusion behavior[J]. Chinese Journal of Liquid Crystals and Displays, 2025, 40(8): 1100

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    Paper Information

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    Received: Apr. 2, 2025

    Accepted: --

    Published Online: Sep. 25, 2025

    The Author Email: Zhinong YU (znyu@bit.edu.cn)

    DOI:10.37188/CJLCD.2025-0074

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