Chinese Journal of Lasers, Volume. 42, Issue 8, 809003(2015)

Preparation of 528 nm Periodic Hole Array Based on Holographic Lithography System

Ye Zhen*, Wang Yong, Gao Zhanqi, Liu Dandan, Zhuang Yunyi, Zhang Siyuan, and Wang Xiaohua
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    Ye Zhen, Wang Yong, Gao Zhanqi, Liu Dandan, Zhuang Yunyi, Zhang Siyuan, Wang Xiaohua. Preparation of 528 nm Periodic Hole Array Based on Holographic Lithography System[J]. Chinese Journal of Lasers, 2015, 42(8): 809003

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    Paper Information

    Category: holography and information processing

    Received: Feb. 2, 2015

    Accepted: --

    Published Online: Sep. 24, 2022

    The Author Email: Zhen Ye (yezhenleaf@126.com)

    DOI:10.3788/cjl201542.0809003

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