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Chinese Journal of Lasers, Volume. 40, Issue 6, 616001(2013)

Design of Diffractive Optical Element for Pupil Shaping Optics in Projection Lithography System

Hu Zhonghua1,2、*, Yang Baoxi1,2, Zhu Jing1, Xiao Yanfen1, Zeng Aijun1,2, and Huang Huijie1,2
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    Hu Zhonghua, Yang Baoxi, Zhu Jing, Xiao Yanfen, Zeng Aijun, Huang Huijie. Design of Diffractive Optical Element for Pupil Shaping Optics in Projection Lithography System[J]. Chinese Journal of Lasers, 2013, 40(6): 616001

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Jan. 7, 2013

    Accepted: --

    Published Online: May. 15, 2013

    The Author Email: Zhonghua Hu (huzhonghua@siom.ac.cn)

    DOI:10.3788/cjl201340.0616001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology