Journal of Infrared and Millimeter Waves, Volume. 41, Issue 6, 987(2022)

Study on Molecular Beam Epitaxy of High indium InGaAs Films

Ying YANG1,2, Hong-Zhen WANG2, Liu-Yan FAN3, Ping-Ping CHEN3, Bo-Wen LIU2, Xun-Jun HE1、*, Yi GU2、**, Ying-Jie MA2, Tao LI2, Xiu-Mei SHAO2, and Xue LI2
Author Affiliations
  • 1College of Science,Harbin University of Science and Technology,Harbin 150080,China
  • 2State Key Laboratories of Transducer Technology,Shanghai Institute of Technical Physics,Chinese Academy of Sciences Shanghai200083,China
  • 3State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences Shanghai200083,China
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    Figures & Tables(9)
    Schematic structure of high indium InGaAs materials
    (a) PL spectra at RT, and (b) XRD scan curve of sample E
    (a)PL intensity and (b)XRD FWHM and XRD peak intensity ratio (layer/substrate) as a function of growth temperatures
    Background carrier concentration and mobility as a function of growth temperatures of In0.74Ga0.26As layers
    (a)PL intensity and (b)XRD FWHM and XRD peak intensity ratio (layer/substrate) as a function of V/III ratios
    Background carrier concentration and mobility as a function of V/III ratios
    (a)PL intensity and (b)XRD FWHM and XRD peak intensity ratio (layer/substrate) as a function of arsenic dimers
    Background carrier concentration and mobility as a function of arsenic dimers
    • Table 1. Growth parameters of InGaAs layers for different samples

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      Table 1. Growth parameters of InGaAs layers for different samples

      样品编号In0.74Ga0.26As层生长温度/℃V/III比As分子束形态
      A55018As2
      B57018As2
      C58018As2
      D59018As2
      E57012As2
      F57036As2
      G57027As4&As2
      H57036As4
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    Ying YANG, Hong-Zhen WANG, Liu-Yan FAN, Ping-Ping CHEN, Bo-Wen LIU, Xun-Jun HE, Yi GU, Ying-Jie MA, Tao LI, Xiu-Mei SHAO, Xue LI. Study on Molecular Beam Epitaxy of High indium InGaAs Films[J]. Journal of Infrared and Millimeter Waves, 2022, 41(6): 987

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    Paper Information

    Category: Research Articles

    Received: May. 5, 2022

    Accepted: --

    Published Online: Feb. 6, 2023

    The Author Email: Xun-Jun HE (hexunjun@hrbust.edu.cn), Yi GU (guyi@mail.sitp.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2022.06.007

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