Optoelectronic Technology, Volume. 41, Issue 4, 315(2021)

Passivation Protection of Polyimide in Amorphous InGaZnO Thin Film Transistors

Qingping LIN1 and Shenglin WANG2
Author Affiliations
  • 1College of Electronic and Computer Engineering, Shenzhen Graduate School of Peking University, Shenzhen Guangdong 5807, CHN
  • 2Shenzhen Dalton Electronic Material Co., Ltd., Shenzhen Guangdong 518000, CHN
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    References(21)

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    [14] Huang S Y, Chang T C, Chen M C et al. Effects of ambient atmosphere on electrical characteristics of Al2O3 passivated InGaZnO thin film transistors during positive-bias-temperature-stress operation[J]. Electrochemical and Solid-State Letters, 14, H177-H179(2011).

    [15] Jang Joo Kim. Low-temperature organic (CYTOP) passivation for improvement of electric characteristics and reliability in IGZO TFTs[J]. IEEE Electron Device Letters, 33, 381-383(2012).

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    [17] Chung W F, Chang T C, Li H W. Influence of H2O dipole on subthreshold swing of amorphous indium-gallium-zinc-oxide thin film transistors[J]. Electrochemical and Solid-State Letters, 14, H114-H116(2011).

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    [21] Hyun Jae Kim, Chul Jong Han, Yoo Byungwook. Effects of intense pulsed light (IPL) rapid annealing and back-channel passivation on solution-processed In-Ga-Zn-O thin film transistors array[J]. Micromachines, 11, 508(2020).

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    Qingping LIN, Shenglin WANG. Passivation Protection of Polyimide in Amorphous InGaZnO Thin Film Transistors[J]. Optoelectronic Technology, 2021, 41(4): 315

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    Paper Information

    Category: Research and Trial-manufacture

    Received: Mar. 10, 2021

    Accepted: --

    Published Online: Aug. 3, 2022

    The Author Email:

    DOI:10.19453/j.cnki.1005-488x.2021.04.012

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