Optoelectronic Technology, Volume. 41, Issue 4, 315(2021)

Passivation Protection of Polyimide in Amorphous InGaZnO Thin Film Transistors

Qingping LIN1 and Shenglin WANG2
Author Affiliations
  • 1College of Electronic and Computer Engineering, Shenzhen Graduate School of Peking University, Shenzhen Guangdong 5807, CHN
  • 2Shenzhen Dalton Electronic Material Co., Ltd., Shenzhen Guangdong 518000, CHN
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    Figures & Tables(6)
    Process chart of bottom gate a-IGZO
    Id-Vg characteristics of TFTs with different aspect ratios before organic PI passivation
    Id-Vg characteristics of organic PI passivated TFTs with different aspect ratios
    The characteristic degradation of the device under stress condition without passivation
    The characteristic degradation of the device under stress condition with PI passivation
    ΔVth of a-IGZO TFT without passivation layer and with PI as passivation layer varing with stress time
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    Qingping LIN, Shenglin WANG. Passivation Protection of Polyimide in Amorphous InGaZnO Thin Film Transistors[J]. Optoelectronic Technology, 2021, 41(4): 315

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    Paper Information

    Category: Research and Trial-manufacture

    Received: Mar. 10, 2021

    Accepted: --

    Published Online: Aug. 3, 2022

    The Author Email:

    DOI:10.19453/j.cnki.1005-488x.2021.04.012

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