Optoelectronic Technology, Volume. 41, Issue 4, 315(2021)

Passivation Protection of Polyimide in Amorphous InGaZnO Thin Film Transistors

Qingping LIN1 and Shenglin WANG2
Author Affiliations
  • 1College of Electronic and Computer Engineering, Shenzhen Graduate School of Peking University, Shenzhen Guangdong 5807, CHN
  • 2Shenzhen Dalton Electronic Material Co., Ltd., Shenzhen Guangdong 518000, CHN
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    Amorphous InGaZnO thin-film transistors (a-IGZO TFTs) passivated by a polyimide (PI) layer has been fabricated. The PI passivation layer has been deposited by the spin-coating method, which could reduce the damage of back surface of a-IGZO channel caused by the passivation layer deposition process and improve the device performance . The PI passivation could effectively block the ambient atmosphere, protecting the TFTs from performance deterioration resulted by H2O and O2 molecule adsorption effects. Moreover, TFTs passivated by PI showed improved stability under negative gate-bias stress (NBS). The improved stability was inferred to be related to the passivation of traps within the a-IGZO channel by hydrogen which could be diffused into the device from the PI layer during the baking process.

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    Qingping LIN, Shenglin WANG. Passivation Protection of Polyimide in Amorphous InGaZnO Thin Film Transistors[J]. Optoelectronic Technology, 2021, 41(4): 315

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    Paper Information

    Category: Research and Trial-manufacture

    Received: Mar. 10, 2021

    Accepted: --

    Published Online: Aug. 3, 2022

    The Author Email:

    DOI:10.19453/j.cnki.1005-488x.2021.04.012

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