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Acta Optica Sinica, Volume. 40, Issue 17, 1736001(2020)

Preparation of Subwavelength Nanostructures Based on Low-Energy Ion Bombardment

Gaoyuan Yang, Maoqi Cai, Jinyu Li, Huoyao Chen, Ying Liu*, and Yilin Hong
Author Affiliations
  • National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, Anhui 230029, China
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    Article index updated: Mar. 10, 2025

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    Gaoyuan Yang, Maoqi Cai, Jinyu Li, Huoyao Chen, Ying Liu, Yilin Hong. Preparation of Subwavelength Nanostructures Based on Low-Energy Ion Bombardment[J]. Acta Optica Sinica, 2020, 40(17): 1736001

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    Paper Information

    Category: Letters

    Received: May. 29, 2020

    Accepted: Jul. 15, 2020

    Published Online: Aug. 28, 2020

    The Author Email: Liu Ying (liuychch@ustc.edu.cn)

    DOI:10.3788/AOS202040.1736001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology