Journal of Semiconductors, Volume. 43, Issue 2, 023101(2022)
A review of compact modeling for phase change memory
Fig. 1. (Color online) Schematics of two typical PCM cell structures: (a) the mushroom type and (b) the confinement type. In between the metal electrodes are the phase change materials, which show the crystalline phase (blue atoms in color) and amorphous phase (silver atoms in color).
Fig. 2. (Color online) (a) Stable phase states and the atomistic structures. (b) The phase change dynamics with RESET/SET/READ pulses. Reprinted by permission from Springer Nature Customer Service Centre GmbH: Springer Nature MRS Bulletin, Phase-change materials in electronics and photonics, Wei Zhang
Fig. 3. (Color online) Schematic diagram of the crystallization from the energy perspective. (a) The nucleation is described as a process with energy barrier of
Fig. 4. Probability densities of nucleation and growth per nanosecond as given by the above CNG model. The bell-shaped characteristics have been widely used in PCM simulations in literature. Reprinted from Ref. [
Fig. 5. (Color online) (a) Schematic diagram of three phases and their transitions and (b) dependence of the phase transition rates on temperature. © [2008] IEEE. Reprinted with permission from Ref. [
Fig. 6. (Color online) Schematic for the memory programing with desired temperature pulses. For a SET there can be two themes: a “solid phase crystallization” (SPC) and a “melting and slow cooling” (MSC). The slow cooling corresponds to a crystallization process below the melting temperature.
Fig. 7. (a) Core block of the model. (b)
Fig. 8. Flowchart of the binary macro model with different modules to decide the temperature and the phase. © [2006] IEEE. Reprinted with permission from Ref. [
Fig. 9.
Fig. 10. (Color online) Crystallization dynamics as given by the JMAK theory and the experimental data under different temperatures. Temperature dependence of the time constant follows approximately the Arrhenius law. © [2007] IEEE. Reprinted with permission from Ref. [
Fig. 11. (Color online) Auxiliary circuits are introduced to implement the crystallization kinetics of Eq. (12). © [2007] IEEE. Reprinted with permission from Ref. [
Fig. 12. (Color online) A dynamic “versatile” function
Fig. 13. (Color online) (a) Current of the PCM versus voltage with vary amorphization fraction
Fig. 14. (Color online) (a) Equivalent circuit model, including all the modules: the transport module, the thermal module and phase transition module. (b) Model compared with experiment data on
Fig. 15. (Color online) (a) The distribution of conductance values as a function of the number of partial SET pulses. Reprinted from Ref. [
Fig. 16. (Color online) (a) Resistance as a function of time for the amorphous (reset) and crystalline (set) states of a PCM device. © [2010] IEEE. Reprinted with permission from Ref. [
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Feilong Ding, Baokang Peng, Xi Li, Lining Zhang, Runsheng Wang, Zhitang Song, Ru Huang. A review of compact modeling for phase change memory[J]. Journal of Semiconductors, 2022, 43(2): 023101
Category: Reviews
Received: Aug. 24, 2021
Accepted: --
Published Online: Feb. 16, 2022
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