[1] Lu F J, Xu Y P, Zhang F et al. Hard X-ray Modulation Telescope satellite and its scientific objectives[J]. Modern Physics, 28, 4-11(2016).

[2] Zhang S N. Development prospect of world space high energy astronomy[J]. Space International, 6-12(2009).

[3] Ouyang Z Y, Li C L, Zou Y L et al. Progress of deep space exploration and development strategy of deep space exploration in China[J]. Aerospace China, 28-32(2002).

[4] Wang H Y, Zhang C M, Chen Y. X-ray imaging spectrometer system of Chang’e-1 satellite[J]. Deep Space Exploration, 19-23(2007).

[5] Pan T, Lu F J, Ni R L et al. HXMT satellite system design and technical achievements[J]. Spacecraft Engineering, 27, 1-8(2018).

[6] Bradt H, Garmire G, Oda M et al. The modulation collimator in X-ray astronomy[J]. Space Science Reviews, 8, 471-506(1968).

[7] Hoekstra R, D’Arnaud T E, van Beek H F. Optical alignment of an X-ray collimator[J]. Applied Optics, 20, 3630-3634(1981).

[8] Tang C M, Stier E, Fischer K et al. Anti-scattering X-ray grid[J]. Microsystem Technologies, 4, 187-192(1998).

[9] Kevin F, Bidhan C, Henry G et al. Fabrication of two-dimensional X-ray antiscatter grids for mammography[J]. Proceedings of SPIE, 4145, 227-234(2001).

[10] Makarova O V, Yang G H, Tang C M et al. Fabrication of collimators for gamma-ray imaging[J]. Proceedings of SPIE, 5539, 126-132(2004).

[11] Cho H, Kim K, Lee B et al. Physical characteristics of precise antiscatter grids fabricated with a sawing process for applications to digital X-ray imaging[J]. Journal of the Korean Physical Society, 52, 243-248(2008).

[12] Makarova O V, Zyryanov V N, Divan R et al. Fabrication of grids and collimators using SU-8 as a mold[J]. Microsystem Technologies, 10, 536-539(2004).

[13] Jeong D H, Kim J M, Noh D Y et al. Micromachined anti-scatter grid fabricated using crystalline wet etching of (110) silicon and metal electroplating for X-ray imaging[J]. Nuclear Instruments and Methods in Physics Research Section A, 652, 846-849(2011).

[14] Lehmann V, Rönnebeck S. MEMS techniques applied to the fabrication of anti-scatter grids for X-ray imaging[J]. Sensors and Actuators A, 95, 202-207(2002).

[15] Yang S Q, Wang D, Lu G D et al. Wire cutting technology of integrated grid collimator[J]. Metal Working (Metal Cutting), 30-34(2015).

[16] Jia H, Yao Y, Shi W J. The development of mechanical collimator[J]. Optical Technique, 33, 182-184(2007).

[17] Zhong M L, Yang L, Liu W J et al. Laser direct manufacturing W/Ni telescope collimation component[J]. Chinese Journal of Lasers, 31, 482-486(2004).

[18] Cao X L, Jiang W C, Zhang W C et al. Design and verification of medium energy telescope onboard HXMT satellite[J]. Spacecraft Engineering, 27, 127-133(2018).

[19] Zhang H W, Hong Z J, Xi X M et al. Quasi CW fiber laser achieves high brightness 8 kW peak power output[J]. Chinese Journal of Lasers, 48, 2116001(2021).

[20] Zhang D, Zhao L, Liu A B et al. Understanding and controlling the influence of laser energy on penetration, porosity, and microstructure during laser welding[J]. Chinese Journal of Lasers, 48, 1502005(2021).