Fig. 1. Schematic of anti-scatter grid of collimator

Fig. 2. Manufacturing technique for collimator grid structures. (a) LIGA method^[8]; (b) lithography-wet etching-electroplating method^[13]; (c) electrical discharge wire-cutting method^[15]

Fig. 3. Schematic of manufacturing flow for the collimator

Fig. 4. SEM micrographs of laser welding spots under different welding conditions. (a) Pulse width is 8 ms; (b) laser power is 200 W

Fig. 5. Finite element analysis of the deformation of laser spot welded grid cell. (a) Numerical model; (b)(c) buckling deformation at laser power of 200 W and 320 W; (d)(e) welding strategy and corresponding buckling deformation of the grid cell at laser power of 320 W

Fig. 6. Laser welding and assembling of grid cell

Fig. 7. Schematic of welding equipment and dynamic focusing galvanometer. (a) Welding equipment; (b) dynamic focusing galvanometer

Fig. 8. Photos of laser precision welding equipment and collimator. (a) Welding equipment; (b) welding process; (c) collimator component