Chinese Journal of Lasers, Volume. 49, Issue 7, 0703001(2022)

Solution-Processed Zirconia Dielectrics with UV/IR Annealing for Organic Film Transistor

Yingtao Xie1, Kunlin Cai1, Penglong Chen1, Yu Liu1, and Dongping Wang2、*
Author Affiliations
  • 1School of Optoelectronic Engineering, Chongqing University of Posts and Telecommunications, Chongqing 400065, China
  • 2Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences, Suzhou, Jiangsu 215163, China
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    References(33)

    [1] Sun T M, Xiao Y, Huo J P et al. Nanojoining and electrical performance modulation of metal oxide nanowires based on femtosecond laser irradiation[J]. Chinese Journal of Lasers, 48, 0802006(2021).

    [2] Mei H H, Cui J L, Cheng Y et al. Heterogeneous connection of carbon nanotubes with metal electrodes and its electrical properties[J]. Chinese Journal of Lasers, 48, 0802023(2021).

    [3] Wang D, Wang X D, Ma H et al. Progress of doping in Ga2O3 materials[J]. Laser & Optoelectronics Progress, 58, 1516025(2021).

    [4] Xie Y T, Ouyang S H, Wang D P et al. Highly smooth and conductive silver film with metallo-organic decomposition ink for all-solution-processed flexible organic thin-film transistors[J]. Journal of Materials Science, 55, 15908-15918(2020).

    [5] Xie Y T, Cai S C, Shi Q et al. High performance organic thin film transistors using chemically modified bottom contacts and dielectric surfaces[J]. Organic Electronics, 15, 2073-2078(2014).

    [6] Xie Y T, Ouyang S H, Wang D P et al. High performance top contact fused thiophene-diketopyrrolopyrrole copolymer transistors using a photolithographic metal lift-off process[J]. Organic Electronics, 20, 55-62(2015).

    [7] Xie Y T, Wang D P, Li M et al. High stability and uniformity polymeric thin-film transistor arrays fabricated by directly subtractive photolithography[J]. Molecular Crystals and Liquid Crystals, 665, 145-153(2018).

    [8] Xie Y T, Wang D P, Fong H H. High-performance solution-processed amorphous InGaZnO thin film transistors with a metal-organic decomposition method[J]. Journal of Nanomaterials, 2018, 1-7(2018).

    [9] Xie Y T, Wang D P, Cui W et al. Fabrication of flexible organic thin-film transistors based on negative acting photosensitive novolak polymer as an organic gate insulator[J]. Molecular Crystals and Liquid Crystals, 664, 135-141(2018).

    [10] Shi Q, Xie Y T, Cai S C et al. High performance tetrathienoacene-DDP based polymer thin-film transistors using a photo-patternable epoxy gate insulating layer[J]. Organic Electronics, 15, 991-996(2014).

    [11] Dutta G, DasGupta N, DasGupta A. Low-temperature ICP-CVD SiNx as gate dielectric for GaN-based MIS-HEMTs[J]. IEEE Transactions on Electron Devices, 63, 4693-4701(2016).

    [12] Yao R H, Zheng Z K, Zeng Y et al. Preparation of Al2O3 dielectric layers at room temperature based on flexible displays[J]. Acta Optica Sinica, 37, 0331001(2017).

    [13] Song K, Yang W, Jung Y et al. A solution-processed yttrium oxide gate insulator for high-performance all-solution-processed fully transparent thin film transistors[J]. Journal of Materials Chemistry, 22, 21265-21271(2012).

    [14] Hung W H, Juang F R, Fang Y K et al. Modelling and characterisation of flat-band roll-off behaviours in LaOx capped high-K/metal-gate NMOSFET with 28 nm CMOS technology[J]. International Journal of Nanotechnology, 11, 1039-1046(2014).

    [15] Kumar S, Kumar H, Vura S et al. Investigation of Ta2O5 as an alternative high-k dielectric for InAlN/GaN MOS-HEMT on Si[J]. IEEE Transactions on Electron Devices, 66, 1230-1235(2019).

    [16] Sung S, Park S, Lee W J et al. Low-voltage flexible organic electronics based on high-performance sol-gel titanium dioxide dielectric[J]. ACS Applied Materials & Interfaces, 7, 7456-7461(2015).

    [17] Yu M C, Ruan D B, Liu P T et al. High performance transparent a-IGZO thin film transistors with ALD-HfO2 gate insulator on colorless polyimide substrate[J]. IEEE Transactions on Nanotechnology, 19, 481-485(2020).

    [18] Cai W, Zhu Z N, Wei J L et al. A simple method for high-performance, solution-processed, amorphous ZrO2 gate insulator TFT with a high concentration precursor[J]. Materials, 10, 972(2017).

    [19] Lee W J, Park W T, Park S et al. Large-scale precise printing of ultrathin sol-gel oxide dielectrics for directly patterned solution-processed metal oxide transistor arrays[J]. Advanced Materials, 27, 5043-5048(2015).

    [20] Oluwabi A T, Katerski A, Carlos E et al. Application of ultrasonic sprayed zirconium oxide dielectric in zinc tin oxide-based thin film transistor[J]. Journal of Materials Chemistry C, 8, 3730-3739(2020).

    [21] Lee G, Lai B K, Phatak C et al. Interface-controlled high dielectric constant Al2O3/TiOx nanolaminates with low loss and low leakage current density for new generation nanodevices[J]. Journal of Applied Physics, 114, 027001(2013).

    [22] Deen D A, Champlain J G, Koester S J. Multilayer HfO2/TiO2 gate dielectric engineering of graphene field effect transistors[J]. Applied Physics Letters, 103, 073504(2013).

    [23] Geng G Z, Liu G X, Shan F K et al. Improved performance of InGaZnO thin-film transistors with Ta2O5/Al2O3 stack deposited using pulsed laser deposition[J]. Current Applied Physics, 14, S2-S6(2014).

    [24] Ruan D B, Liu P T, Chiu Y C et al. Effect of interfacial layer on device performance of metal oxide thin-film transistor with a multilayer high-k gate stack[J]. Thin Solid Films, 660, 578-584(2018).

    [25] Gao Y N, Li X F, Zhang J H. Solution-processed high performance HIZO thin film transistor with AZO gate dielectric[J]. Acta Physica Sinica, 63, 118502(2014).

    [26] Dong H K, Shi L B. Impact of native defects in the high dielectric constant oxide HfSiO4 on MOS device performance[J]. Chinese Physics Letters, 33, 016101(2016).

    [27] Han C Y, Lai P T, Tang W M. High-performance pentacene organic thin-film transistor based on room-temperature-processed Hf0.13La0.87O as gate dielectric[J]. IEEE Electron Device Letters, 42, 339-342(2021).

    [28] Zhang C, He G, Fang Z B et al. Eco-friendly fully water-driven HfGdOx gate dielectrics and its application in thin-film transistors and logic circuits[J]. IEEE Transactions on Electron Devices, 67, 1001-1008(2020).

    [29] Feng J, Cheng L J, Li Z B et al. Structure, B-site short-range ordering and dielectric properties of Ba(Zn1/3Ta2/3)O3 microwave ceramics with sub-micron sized grains by spark plasma sintering[J]. Materials Research Express, 4, 066302(2017).

    [30] Matthews J R, Niu W J, Tandia A et al. Scalable synthesis of fused thiophene-diketopyrrolopyrrole semiconducting polymers processed from nonchlorinated solvents into high performance thin film transistors[J]. Chemistry of Materials, 25, 782-789(2013).

    [31] Guglielmi M, Carturan G. Precursors for sol-gel preparations[J]. Journal of Non-Crystalline Solids, 100, 16-30(1988).

    [32] Landau L, Lifshitz E M[M]. Fluid mechanics, 44-50(1987).

    [33] Lee Y, Ha Y G. A phosphonic acid self-assembled monolayer on UV-cured metal oxides as gate dielectrics for low-voltage organic field-effect transistors[J]. Bulletin of the Korean Chemical Society, 39, 601-604(2018).

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    Yingtao Xie, Kunlin Cai, Penglong Chen, Yu Liu, Dongping Wang. Solution-Processed Zirconia Dielectrics with UV/IR Annealing for Organic Film Transistor[J]. Chinese Journal of Lasers, 2022, 49(7): 0703001

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    Paper Information

    Received: Aug. 20, 2021

    Accepted: Sep. 30, 2021

    Published Online: Mar. 2, 2022

    The Author Email: Dongping Wang (vipwdp@126.com)

    DOI:10.3788/CJL202249.0703001

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