Chinese Optics, Volume. 18, Issue 4, 931(2025)

785 nm semiconductor laser with shallow etched gratings

Yu-xin YUE, Yong-gang ZOU*, Jie FAN, Xi-yao FU, Nai-yu ZHANG, Ying-min SONG, Zhuo-er HUANG, and Xiao-hui MA*
Author Affiliations
  • State Key Laboratory of High-Power Semiconductor Lasers, Changchun University of Science and Technology, Changchun 130022, China
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    Figures & Tables(13)
    (a) Epitaxial structure of the traditional chip; (b) epitaxial structure of the proposed chip; (c) structure of the DBR laser; (d) gain spectrum
    Mode field distribution for different p-side waveguide thicknesses
    Mode distribution under asymmetric waveguide abtained by FDE. (a) versus Γ; (b) waveguide refractive index, waveguide width versus divergence angle
    (a) The relationship among different waveguide thicknesses and divergence angle and output power; (b) comparison of current density in the horizontal direction at different etching depths
    (a) Refractive index of electron-blocking layer; (b) output power at different components on the EBL
    (a) Light field distribution; (b) energy band diagram of different aluminum components
    Comparison of output power of different structures
    (a) Comparison of output power and (b) electron concentration of different waveguide structures
    Effect of different Al components of ERL on output power and light confinement factor
    Simulated mode distribution for different Al contents. Inset shows their optical confinement factor on p-side and divergence angle
    The refractive index and light field distributed in the transverse direction
    (a) Refractive index distribution of the grating; (b) the relationship between different etching depths and reflectivity
    • Table 1. Parameters of each layer

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      Table 1. Parameters of each layer

      NumberLayerMaterialThickness/μmDoping/m−3
      1Top-claddingAl0.45Ga0.55As0.21×1025
      2Mode expansionAl0.35Ga0.65As0.11×1025
      3Lower-claddingAl0.45Ga0.55As0.11×1025
      4waveguideAl0.45-0.4GaAs0.08none
      5Waveguide (EBL)Al0.42Ga0.58As0.02none
      6barrierAl0.32Ga0.68As0.015none
      7wellGaAs0.83P0.170.007none
      8barrierAl0.32Ga0.68As0.015none
      9Waveguide (ERL)Al0.3Ga0.7As0.1none
      10waveguideAl0.4-0.45GaAs0.8none
      11claddingAl0.45Ga0.55As0.41×1025
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    Yu-xin YUE, Yong-gang ZOU, Jie FAN, Xi-yao FU, Nai-yu ZHANG, Ying-min SONG, Zhuo-er HUANG, Xiao-hui MA. 785 nm semiconductor laser with shallow etched gratings[J]. Chinese Optics, 2025, 18(4): 931

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    Paper Information

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    Received: Jun. 26, 2024

    Accepted: Aug. 22, 2024

    Published Online: Aug. 13, 2025

    The Author Email: Yong-gang ZOU (zouyg@cust.edu.cn), Xiao-hui MA (mxh@cust.edu.cn)

    DOI:10.37188/CO.EN-2024-0019

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