Experimental Study on Highly Effective Broadband Extreme Ultraviolet Light Source by Spatially Confined Plasma

Liang He; Zhenlin Hu; Tianze Wang; Nan Lin; Yuxin Leng

doi:10.3788/LOP242211

Laser & Optoelectronics Progress, Volume. 62, Issue 3, 0314001(2025)

Experimental Study on Highly Effective Broadband Extreme Ultraviolet Light Source by Spatially Confined Plasma

Liang He^1,2, Zhenlin Hu^1,2, Tianze Wang^1,2, Nan Lin^1,2、*, and Yuxin Leng^1,2

¹Key Laboratory of Ultra-Intense Laser Science and Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Department of Precision Optics Engineering, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

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References(35)

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Liang He, Zhenlin Hu, Tianze Wang, Nan Lin, Yuxin Leng. Experimental Study on Highly Effective Broadband Extreme Ultraviolet Light Source by Spatially Confined Plasma[J]. Laser & Optoelectronics Progress, 2025, 62(3): 0314001

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Paper Information

Category: Lasers and Laser Optics

Received: Nov. 4, 2024

Accepted: Dec. 6, 2024

Published Online: Feb. 10, 2025

The Author Email: Nan Lin (nanlin@siom.ac.cn)

DOI:10.3788/LOP242211

CSTR:32186.14.LOP242211

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology