Experimental Study on Highly Effective Broadband Extreme Ultraviolet Light Source by Spatially Confined Plasma

Liang He; Zhenlin Hu; Tianze Wang; Nan Lin; Yuxin Leng

doi:10.3788/LOP242211

Laser & Optoelectronics Progress, Volume. 62, Issue 3, 0314001(2025)

Experimental Study on Highly Effective Broadband Extreme Ultraviolet Light Source by Spatially Confined Plasma

Liang He^1,2, Zhenlin Hu^1,2, Tianze Wang^1,2, Nan Lin^1,2、*, and Yuxin Leng^1,2

¹Key Laboratory of Ultra-Intense Laser Science and Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Department of Precision Optics Engineering, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

show less

Abstract Get PDF(in Chinese)

Figures & Tables(7)

Fig. 1. Layout of broadband LPP-EUV light source experiment

Download full size

Fig. 2. EUV spectrometer

Download full size

$Transmission efficiency characterization. (a) Reflectivity of Au mirror; (b) diffraction efficiency of EUV grating; (c) CCD quantum efficiency; (d) transmission efficiency of EUV spectrometer$

Fig. 3. Transmission efficiency characterization. (a) Reflectivity of Au mirror; (b) diffraction efficiency of EUV grating; (c) CCD quantum efficiency; (d) transmission efficiency of EUV spectrometer

Download full size

Fig. 4. EUV spectra at different laser intensities for the first and second pulse

Download full size

Fig. 5. Conversion efficiency of the first and second pulse at different laser intensities. (a) 13.5 nm (2% bandwidth) conversion efficiency; (b) total conversion efficiency of 10‒20 nm

Download full size

Fig. 6. Comparison of the first and second laser pulses ablating the target surface

Download full size

Table 1. Full width at half maximum of EUV spectra at different laser intensities for the first and second pulse
View table
Table 1. Full width at half maximum of EUV spectra at different laser intensities for the first and second pulse
Pulse number Full width at half maximum /nm
0.33×10¹⁰ W/cm² 0.58×10¹⁰ W/cm² 2.1×10¹⁰ W/cm² 3.45×10¹⁰ W/cm² 5.38×10¹⁰ W/cm²
First 5.97 2.57 2.83 2.33 2.15
Second 6.51 5.24 3.91 3.41 3.03

Tools

Get Citation

Copy Citation Text

Liang He, Zhenlin Hu, Tianze Wang, Nan Lin, Yuxin Leng. Experimental Study on Highly Effective Broadband Extreme Ultraviolet Light Source by Spatially Confined Plasma[J]. Laser & Optoelectronics Progress, 2025, 62(3): 0314001

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites