Piezoelectrics & Acoustooptics, Volume. 47, Issue 1, 88(2025)

Study on the Performance of SiO2 Thermal Compensation Layer for Temperature-Compensated Surface Acoustic Wave

HE Zhen... LI Yan, TIAN Benlang, MA Jinyi, XIAO Qiang and LIANG Liuhong |Show fewer author(s)
Author Affiliations
  • The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China
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    References(4)

    [1] [1] CHEN Pu, LI Guangxi, ZHU Zhiyuan. Development and application of SAW filter[J]. Micromachines, 2022, 13: 656.

    [4] [4] MATSUDA S, HARA M, MIURA M, et al. Application of fluorine doped SiO2 films for temperature compensated SAW devices[C]∥USA: IEEE, 2011: 76-78.

    [5] [5] MATSUDA S, MIURA M, MATSUDA T, et al. Correlation between fluorine-doped SiO2 films properties and the propagation loss for temperature compensated SAW devices[C]∥USA: IEEE, 2012: 1256.

    [6] [6] ANDERS A. A structure zone diagram including plasma based deposition and ion etching[J]. Thin Solid Films, 2010, 518(15): 4087-4090.

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    HE Zhen, LI Yan, TIAN Benlang, MA Jinyi, XIAO Qiang, LIANG Liuhong. Study on the Performance of SiO2 Thermal Compensation Layer for Temperature-Compensated Surface Acoustic Wave[J]. Piezoelectrics & Acoustooptics, 2025, 47(1): 88

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    Paper Information

    Received: Aug. 26, 2024

    Accepted: Apr. 17, 2025

    Published Online: Apr. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.01.014

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