Piezoelectrics & Acoustooptics, Volume. 47, Issue 1, 88(2025)

Study on the Performance of SiO2 Thermal Compensation Layer for Temperature-Compensated Surface Acoustic Wave

HE Zhen, LI Yan, TIAN Benlang, MA Jinyi, XIAO Qiang, and LIANG Liuhong
Author Affiliations
  • The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China
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    HE Zhen, LI Yan, TIAN Benlang, MA Jinyi, XIAO Qiang, LIANG Liuhong. Study on the Performance of SiO2 Thermal Compensation Layer for Temperature-Compensated Surface Acoustic Wave[J]. Piezoelectrics & Acoustooptics, 2025, 47(1): 88

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    Paper Information

    Received: Aug. 26, 2024

    Accepted: Apr. 17, 2025

    Published Online: Apr. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.01.014

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