Acta Optica Sinica, Volume. 42, Issue 10, 1022002(2022)
Critical Pattern Selection Method for Full-Chip Source and Mask Optimization Based on Depth-First Search
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Xinhua Yang, Sikun Li, Lufeng Liao, Libin Zhang, Shuang Zhang, Shengrui Zhang, Weijie Shi, Yayi Wei, Xiangzhao Wang. Critical Pattern Selection Method for Full-Chip Source and Mask Optimization Based on Depth-First Search[J]. Acta Optica Sinica, 2022, 42(10): 1022002
Category: Optical Design and Fabrication
Received: Nov. 17, 2021
Accepted: Dec. 13, 2021
Published Online: May. 10, 2022
The Author Email: Sikun Li (lisikun@siom.ac.com)