Chinese Journal of Lasers, Volume. 48, Issue 9, 0901004(2021)
Recognition of Energy Model of Excimer Laser by Gate Recurrent Unit
Fig. 2. Energy variation of pulses in Burst with different repetition rates under constant high voltage mode
Fig. 6. Maximum error between the energy calculated by GRU and the energy of the actual data set at each voltage
Fig. 8. Comparison graph of single pulse energy obtained by GRU network and single pulse energy of actual data set when voltage is 1550 V. (a) Coincidence graph of test data and actual data; (b) actual data graph; (c) test data graph
Fig. 9. Comparison of laser energy and model generated energy between 1 kHz to 4 kHz repetition frequency under constant high voltage 1500 V. (a) Test data graph; (b) actual data graph
Fig. 10. Maximum error of laser energy and model generated energy between 1 kHz to 4 kHz repetition frequency under constant high voltage 1500 V
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Zebin Feng, Yi Zhou, Rui Jiang, XiaoQuan Han, Xiangyu Xu, Bin Liu. Recognition of Energy Model of Excimer Laser by Gate Recurrent Unit[J]. Chinese Journal of Lasers, 2021, 48(9): 0901004
Category: laser devices and laser physics
Received: Sep. 14, 2020
Accepted: Nov. 23, 2020
Published Online: May. 17, 2021
The Author Email: Zhou Yi (zhouyi1@ime.ac.cn), Jiang Rui (jiangrui@ime.ac.cn), Han XiaoQuan (hanxiaoquan@ime.ac.cn)