Chinese Journal of Lasers, Volume. 48, Issue 9, 0901004(2021)

Recognition of Energy Model of Excimer Laser by Gate Recurrent Unit

Zebin Feng1,2,3, Yi Zhou1,3、*, Rui Jiang1,3、**, XiaoQuan Han1、***, Xiangyu Xu1,3, and Bin Liu1,3
Author Affiliations
  • 1Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Beijing RSLaser Opto-Electronics Technology Co., Ltd., Beijing 100176, China
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    Figures & Tables(10)
    Single pulse energy variation law under constant high voltage mode
    Energy variation of pulses in Burst with different repetition rates under constant high voltage mode
    Recurrent neural network structure diagram
    Hidden layer network structure diagram
    Program flow chart of learning laser energy model using GRU network
    Maximum error between the energy calculated by GRU and the energy of the actual data set at each voltage
    Maximum energy error curve during training
    Comparison graph of single pulse energy obtained by GRU network and single pulse energy of actual data set when voltage is 1550 V. (a) Coincidence graph of test data and actual data; (b) actual data graph; (c) test data graph
    Comparison of laser energy and model generated energy between 1 kHz to 4 kHz repetition frequency under constant high voltage 1500 V. (a) Test data graph; (b) actual data graph
    Maximum error of laser energy and model generated energy between 1 kHz to 4 kHz repetition frequency under constant high voltage 1500 V
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    Zebin Feng, Yi Zhou, Rui Jiang, XiaoQuan Han, Xiangyu Xu, Bin Liu. Recognition of Energy Model of Excimer Laser by Gate Recurrent Unit[J]. Chinese Journal of Lasers, 2021, 48(9): 0901004

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    Paper Information

    Category: laser devices and laser physics

    Received: Sep. 14, 2020

    Accepted: Nov. 23, 2020

    Published Online: May. 17, 2021

    The Author Email: Zhou Yi (zhouyi1@ime.ac.cn), Jiang Rui (jiangrui@ime.ac.cn), Han XiaoQuan (hanxiaoquan@ime.ac.cn)

    DOI:10.3788/CJL202148.0901004

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