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Chinese Journal of Lasers, Volume. 48, Issue 9, 0901004(2021)

Recognition of Energy Model of Excimer Laser by Gate Recurrent Unit

Zebin Feng1,2,3, Yi Zhou1,3、*, Rui Jiang1,3、**, XiaoQuan Han1、***, Xiangyu Xu1,3, and Bin Liu1,3
Author Affiliations
  • 1Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Beijing RSLaser Opto-Electronics Technology Co., Ltd., Beijing 100176, China
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    Article index updated: Mar. 10, 2025

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    Zebin Feng, Yi Zhou, Rui Jiang, XiaoQuan Han, Xiangyu Xu, Bin Liu. Recognition of Energy Model of Excimer Laser by Gate Recurrent Unit[J]. Chinese Journal of Lasers, 2021, 48(9): 0901004

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    Paper Information

    Category: laser devices and laser physics

    Received: Sep. 14, 2020

    Accepted: Nov. 23, 2020

    Published Online: May. 17, 2021

    The Author Email: Zhou Yi (zhouyi1@ime.ac.cn), Jiang Rui (jiangrui@ime.ac.cn), Han XiaoQuan (hanxiaoquan@ime.ac.cn)

    DOI:10.3788/CJL202148.0901004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology