Journal of Synthetic Crystals, Volume. 54, Issue 2, 312(2025)

β-Ga2O3 Field-Effect Transistors with Doped Epitaxial Layer Grown by MOCVD

YU Xinxin1, SHEN Rui1,2, YU Han3, ZHANG Zhao3, SAI Qinglin4, CHEN Duanyang4,5, YANG Zhenni5,6, QIAO Bing1, ZHOU Likun1, LI Zhonghui1,2、*, DONG Xin3, ZHANG Hongliang6, QI Hongji4,5, and CHEN Tangsheng2
Author Affiliations
  • 1CETC Key Laboratory of Carbon-based Electronics, Nanjing Electronic Devices Institute, Nanjing 210016, China
  • 2National Key Laboratory of Solid-State Microwave Devices and Circuits, Nanjing 210016, China
  • 3State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
  • 4Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 5Fujia Gallium Technology Co. Ltd., Hangzhou 311421, China
  • 6College of Chemistry and Chemical Engineering, Xiamen University, Xiamen 361005, China
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    References(11)

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    [8] [8] QIN Y, XIAO M, PORTER M, et al. 10-kV Ga2O3 charge-balance Schottky rectifier operational at 200 ℃[J]. IEEE Electron Device Letters, 2023, 44(8): 1268-1271.

    [9] [9] LI J S, WAN H H, CHIANG C C, et al. Breakdown up to 13.5 kV in NiO/-Ga2O3 vertical heterojunction rectifiers[J]. ECS Journal of Solid State Science and Technology, 2024, 13(3): 035003.

    [10] [10] LIU H Y, WANG Y G, LV Y J, et al. 10-kV lateral -Ga2O3 MESFETs with B ion implanted planar isolation[J]. IEEE Electron Device Letters, 2023, 44(7): 1048-1051.

    [11] [11] WANG C L, YAN Q L, ZHANG C Q, et al. -Ga2O3 lateral Schottky barrier diodes with > 10 kV breakdown voltage and anode engineering[J]. IEEE Electron Device Letters, 2023, 44(10): 1684-1687.

    [12] [12] DONG P F, ZHANG J C, YAN Q L, et al. 6 kV/3.4 m·cm2 vertical -Ga2O3 Schottky barrier diode with BV2/Ron,sp performance exceeding 1-D unipolar limit of GaN and SiC[J]. IEEE Electron Device Letters, 2022, 43(5): 765-768.

    [13] [13] ZHANG J Y, SHI J L, QI D C, et al. Recent progress on the electronic structure, defect, and doping properties of Ga2O3[J]. APL Materials, 2020, 8(2): 020906.

    [14] [14] YU X X, GONG H H, ZHOU J J, et al. High-voltage -Ga2O3 RF MOSFETs with a shallowly-implanted 2DEG-like channel[J]. IEEE Electron Device Letters, 2023, 44(7): 1060-1063.

    [15] [15] QIAO B, DAI P F, YU X X, et al. 2.1 W/mm output power density at 10 GHz for H-terminated diamond MOSFETs with (111)-oriented surface[J]. IEEE Journal of the Electron Devices Society, 2023, 12: 51-55.

    [16] [16] WANG C L, GONG H H, LEI W N, et al. Demonstration of the p-NiOx/n-Ga2O3 heterojunction gate FETs and diodes with BV2/Ron,sp figures of Merit of 0.39 GW/cm2 and 1.38 GW/cm2[J]. IEEE Electron Device Letters, 2021, 42(4): 485-488.

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    YU Xinxin, SHEN Rui, YU Han, ZHANG Zhao, SAI Qinglin, CHEN Duanyang, YANG Zhenni, QIAO Bing, ZHOU Likun, LI Zhonghui, DONG Xin, ZHANG Hongliang, QI Hongji, CHEN Tangsheng. β-Ga2O3 Field-Effect Transistors with Doped Epitaxial Layer Grown by MOCVD[J]. Journal of Synthetic Crystals, 2025, 54(2): 312

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    Paper Information

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    Received: Nov. 20, 2024

    Accepted: Mar. 31, 2025

    Published Online: Mar. 31, 2025

    The Author Email: LI Zhonghui (zhonghuili@126.com)

    DOI:10.16553/j.cnki.issn1000-985x.2024.0284

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