Laser & Optoelectronics Progress, Volume. 62, Issue 17, 1706004(2025)

Fiber-Optic Microelectromechanical System Acoustic Sensor Using a Biomimetic Membrane

Dekun Liu1, Qichao Zhao2, Haoqi Wang1, Chenyang Gui3, Yan Wang3, Shuang Xiao1, Lei Liu1, Rui Ge1, and Bin Liu1、*
Author Affiliations
  • 1College of Information and Communication Engineering, Harbin Engineering University, Harbin 150001, Heilongjiang , China
  • 2Shanghai Electro-Mechanical Engineering Institute, Shanghai 201109, China
  • 3College of Underwater Acoustic Engineering, Harbin Engineering University, Harbin 150001, Heilongjiang , China
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    References(25)

    [5] Kang W W, Shao Z H, Zhou K Y et al. Ultrasonic detection of water content in rock mass based on FBG-FPI optical fiber sensor[J]. Acta Optica Sinica, 44, 0806003(2024).

    [6] Wang Q Y, Yan C Y, Zhu Z H et al. π-shaped cantilever based fiber-optic Fabry-Perot acoustic wave sensor and its application in photoacoustic spectroscopy[J]. Acta Optica Sinica, 45, 0306002(2025).

    [18] Li X P, Wang S, Zhang P et al. Flywheel-like fiber-optic Fabry-Perot acoustic vector sensor based on diaphragm coupling gain principle[J]. Acta Optica Sinica, 43, 2006002(2023).

    [19] Hou Y L, Ji X J, Xia K W. Analysis on sound source orientation mechanism of parasitoid fly[J]. Radio Engineering, 46, 33-37(2016).

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    Dekun Liu, Qichao Zhao, Haoqi Wang, Chenyang Gui, Yan Wang, Shuang Xiao, Lei Liu, Rui Ge, Bin Liu. Fiber-Optic Microelectromechanical System Acoustic Sensor Using a Biomimetic Membrane[J]. Laser & Optoelectronics Progress, 2025, 62(17): 1706004

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    Paper Information

    Category: Fiber Optics and Optical Communications

    Received: Jan. 19, 2025

    Accepted: Feb. 19, 2025

    Published Online: Aug. 11, 2025

    The Author Email: Bin Liu (b.liu@hrbeu.edu.cn)

    DOI:10.3788/LOP250536

    CSTR:32186.14.LOP250536

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