Laser & Optoelectronics Progress, Volume. 62, Issue 17, 1706004(2025)
Fiber-Optic Microelectromechanical System Acoustic Sensor Using a Biomimetic Membrane
Fig. 1. Ear analysis diagrams of Omiya brown fly. (a) Anatomical diagram; (b) equivalent mechanical model; (c) two vibration modes under the mechanical model
Fig. 3. Relationship diagrams of influence of rotating beam on modal frequency. (a) Width influence; (b) length influence
Fig. 6. Analysis diagrams of biomimetic membrane testing. (a) Schematic diagram of membrane; (b) experimental photos of membrane testing; (c) diaphragm frequency response curves; (d) directional response curve of membrane
Fig. 7. Sensor frequency response simulation diagrams.(a) Sensor simulation model; (b) simulation curve of sensor frequency response
Fig. 8. Simulation curves of directional response of sensors. (a) x-y plane; (b) x-z plane
Fig. 9. Sensor preparation diagrams. (a) Schematic diagram of sensor structure; (b) sensor packaging experiment; (c) physicalimage of sensor
Fig. 11. Sensor performance testing experiments. (a) Experimental schematic diagram; (b) experimental physical image
Fig. 13. Minimum detectable sound pressure result diagrams of the sensor. (a) Left; (b) right
Fig. 15. Sensor response curves as a function of sound source azimuth angle. (a) Left; (b) right
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Dekun Liu, Qichao Zhao, Haoqi Wang, Chenyang Gui, Yan Wang, Shuang Xiao, Lei Liu, Rui Ge, Bin Liu. Fiber-Optic Microelectromechanical System Acoustic Sensor Using a Biomimetic Membrane[J]. Laser & Optoelectronics Progress, 2025, 62(17): 1706004
Category: Fiber Optics and Optical Communications
Received: Jan. 19, 2025
Accepted: Feb. 19, 2025
Published Online: Aug. 11, 2025
The Author Email: Bin Liu (b.liu@hrbeu.edu.cn)
CSTR:32186.14.LOP250536