Laser & Optoelectronics Progress, Volume. 62, Issue 17, 1706004(2025)

Fiber-Optic Microelectromechanical System Acoustic Sensor Using a Biomimetic Membrane

Dekun Liu1, Qichao Zhao2, Haoqi Wang1, Chenyang Gui3, Yan Wang3, Shuang Xiao1, Lei Liu1, Rui Ge1, and Bin Liu1、*
Author Affiliations
  • 1College of Information and Communication Engineering, Harbin Engineering University, Harbin 150001, Heilongjiang , China
  • 2Shanghai Electro-Mechanical Engineering Institute, Shanghai 201109, China
  • 3College of Underwater Acoustic Engineering, Harbin Engineering University, Harbin 150001, Heilongjiang , China
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    Figures & Tables(15)
    Ear analysis diagrams of Omiya brown fly. (a) Anatomical diagram; (b) equivalent mechanical model; (c) two vibration modes under the mechanical model
    Schematic diagram of biomimetic membrane structure
    Relationship diagrams of influence of rotating beam on modal frequency. (a) Width influence; (b) length influence
    Simulation diagrams.(a) Swing mode; (b) bending mode
    Physical picture of membrane
    Analysis diagrams of biomimetic membrane testing. (a) Schematic diagram of membrane; (b) experimental photos of membrane testing; (c) diaphragm frequency response curves; (d) directional response curve of membrane
    Sensor frequency response simulation diagrams.(a) Sensor simulation model; (b) simulation curve of sensor frequency response
    Simulation curves of directional response of sensors. (a) x-y plane; (b) x-z plane
    Sensor preparation diagrams. (a) Schematic diagram of sensor structure; (b) sensor packaging experiment; (c) physicalimage of sensor
    Spectral diagram of the sensor after packaging is completed
    Sensor performance testing experiments. (a) Experimental schematic diagram; (b) experimental physical image
    Sensor frequency response test curve
    Minimum detectable sound pressure result diagrams of the sensor. (a) Left; (b) right
    Sensor directivity test curves
    Sensor response curves as a function of sound source azimuth angle. (a) Left; (b) right
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    Dekun Liu, Qichao Zhao, Haoqi Wang, Chenyang Gui, Yan Wang, Shuang Xiao, Lei Liu, Rui Ge, Bin Liu. Fiber-Optic Microelectromechanical System Acoustic Sensor Using a Biomimetic Membrane[J]. Laser & Optoelectronics Progress, 2025, 62(17): 1706004

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    Paper Information

    Category: Fiber Optics and Optical Communications

    Received: Jan. 19, 2025

    Accepted: Feb. 19, 2025

    Published Online: Aug. 11, 2025

    The Author Email: Bin Liu (b.liu@hrbeu.edu.cn)

    DOI:10.3788/LOP250536

    CSTR:32186.14.LOP250536

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