Laser & Optoelectronics Progress, Volume. 62, Issue 17, 1706004(2025)

Fiber-Optic Microelectromechanical System Acoustic Sensor Using a Biomimetic Membrane

Dekun Liu1, Qichao Zhao2, Haoqi Wang1, Chenyang Gui3, Yan Wang3, Shuang Xiao1, Lei Liu1, Rui Ge1, and Bin Liu1、*
Author Affiliations
  • 1College of Information and Communication Engineering, Harbin Engineering University, Harbin 150001, Heilongjiang , China
  • 2Shanghai Electro-Mechanical Engineering Institute, Shanghai 201109, China
  • 3College of Underwater Acoustic Engineering, Harbin Engineering University, Harbin 150001, Heilongjiang , China
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    In this study, we design, fabricate, and thoroughly test a fiber-optic biomimetic microelectromechanical system (MEMS) membrane-type acoustic. A silicon-based coupled-bridge double-diaphragm biomimetic membrane is developed by simulating the auditory organs of parasitic flies. The vibrations of the membrane are detected employing a Fabry-Pérot interferometer composed of optical fibers, thereby enabling the measurement of acoustic signals. The results demonstrate that the fabricated biomimetic membrane exhibits two distinct vibration modes. The packaged sensor demonstrates two resonant frequencies at approximately 810 and 1600 Hz, with minimum detectable sound pressures of 2.76 and 2.17 mPa/Hz1/2, respectively. In addition, the sensor exhibits a figure-eight directional response pattern. Within an incident angle range of 0°?60°, the amplitude of the sensor varies linearly with the angle. Thus, the results indicate that the proposed sensor holds potential for use in miniaturized soundsource target localization systems.

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    Dekun Liu, Qichao Zhao, Haoqi Wang, Chenyang Gui, Yan Wang, Shuang Xiao, Lei Liu, Rui Ge, Bin Liu. Fiber-Optic Microelectromechanical System Acoustic Sensor Using a Biomimetic Membrane[J]. Laser & Optoelectronics Progress, 2025, 62(17): 1706004

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    Paper Information

    Category: Fiber Optics and Optical Communications

    Received: Jan. 19, 2025

    Accepted: Feb. 19, 2025

    Published Online: Aug. 11, 2025

    The Author Email: Bin Liu (b.liu@hrbeu.edu.cn)

    DOI:10.3788/LOP250536

    CSTR:32186.14.LOP250536

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