Fig. 1. Schematic of experimental setup

Fig. 2. SEM images of microstructures induced by femtosecond laser on 6H-SiC surface at different defocusing distances. (a) Polished surface of SiC before femtosecond laser irradiation; (b) ablative holes/spots generated by femtosecond laser dotting at different defocusing distances; (c) microstructure at L=0 mm; (d) microstructure at L=0.3 mm; (e) microstructure at L=0.5 mm; (f) microstructure at L=0.7 mm

Fig. 3. Induced ablative spot diameter on 6H-SiC surface versus defocusing distance

Fig. 4. SEM images of microstructures induced by femtosecond lasers with different powers on 6H-SiC surfaces. (a) P=4 mW; (b) P=8 mW; (c) P=10 mW; (d) P=12 mW; (e) P=14 mW

Fig. 5. Impact of laser polarization direction on LIPSS repeatable erasable effect. (a) LIPSS induced by line scan in vertical direction; (b) LIPSS induced by two line scans in vertical direction; (c) LIPSS induced by line scan in horizontal direction; (d) LIPSS at edge of overlapping area of two line scans; (e) LIPSS in middle of overlapping area of two line scans