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Chinese Journal of Lasers, Volume. 51, Issue 24, 2402404(2024)

Femtosecond Laser Preparation of Subwavelength Periodic Structures on 6H‑SiC Surface and Mechanism

Wanlin He1、* and Yanjun Qin2
Author Affiliations
  • 1School of Science, Xi’an Shiyou University, Xi’an 710065, Shaanxi , China
  • 2School of Science, Xinjiang Institute of Technology, Aksu 843100, Xinjiang , China
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    Wanlin He, Yanjun Qin. Femtosecond Laser Preparation of Subwavelength Periodic Structures on 6H‑SiC Surface and Mechanism[J]. Chinese Journal of Lasers, 2024, 51(24): 2402404

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    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: Mar. 27, 2024

    Accepted: May. 31, 2024

    Published Online: Oct. 16, 2024

    The Author Email: Wanlin He (wlhe@xsyu.edu.cn)

    DOI:10.3788/CJL240715

    CSTR:32183.14.CJL240715

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology