Chinese Journal of Lasers, Volume. 51, Issue 4, 0402407(2024)

Review of Multi‑Scale Theoretical Research on Ultrashort Laser Processing and Coupling Model Construction (Invited)

Wenjun Wang1,2、*, Aifei Pan1,2, and Xuesong Mei1,2
Author Affiliations
  • 1School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710064, Shaanxi , China
  • 2State Key Laboratory for Manufacturing System Engineering, Xi’an Jiaotong University, Xi’an 710064, Shaanxi , China
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    Figures & Tables(14)
    Phenomena at different time scales when materials are exposed to ultrashort laser irradiation[6-7] and the relationship of the contents of this article
    Electron ionization process of dielectric materials when subjected to ultrashort laser action, as described by the time-dependent density functional theory (TDDFT). (a) Influence of laser ellipticity on the generation of higher harmonics in MgO[20]; (b) effect of pulse trains on the population of excited electrons in quartz[23]
    Changes in system energy and material properties of metals generated by photons, which is determined using the finite electron-temperature-based density functional theory (DFT) approach. (a) The density of states (DOS) for different metals varying with electronic temperature[30]; (b) electron heat capacity of various metals varying with electronic temperature[32]
    Computation of electronic parameters of stainless steel using the finite electron-temperature-based DFT approach[33]. (a) Crystal structure of stainless steel; (b) electron-phonon coupling coefficient varying with electronic temperature
    Atomic-scale simulation diagram of energy transfer and molecular decomposition process involved in laser irradiation. (a) Mechanism of phototropic phase transitions in monoclinic VO2[43]; (b) dynamic process of copper and nickel when subjected to ultrashort laser irradiation[44]
    Atomic-scale simulation of the solid-state amorphous process of Ge-Sb-Te at the end of laser pulse irradiation[47]
    Simulation of ultrashort laser material ablation based on electron excitation rate equation[55]. (a) Evolution of electron density with an increase in laser energy; (b) schematic diagram for determining the critical value for material ablation
    Comparison of electronic temperature and lattice temperature obtained by parameter-uncorrected and modified two-temperature equations[61]. (a) Parameter-uncorrected two-temperature equation; (b) parameter-modified two-temperature equation
    Simulation of ultrashort laser ablation based on molecular dynamics[83]. (a) Particle diffusion graphs at various laser energies; (b) evolution of HMX at atomic scales
    Theoretical model that integrates molecular dynamics with two-temperature equation[85]. (a) Schematic diagram of calculation method of coupled molecular dynamics with two-temperature equation; (b) amalgamation of many simulation regions into a single pulse laser ablation pattern
    Electron-phonon coupling coefficient of Au film deduced theoretically varying with electron temperature[93]
    Simulation of the formation process of laser-induced periodic nano-ripple structures on metal surface. (a) Effect of laser energy and pulse number on the formation process of nano-ripples on stainless steel surface[95]; (b) formation process of high and low spatial-frequency nano-ripples on nickel metal surface[96]
    Simulation of the generation of nano‑ripple structures on the surface of dielectric materials. (a) Formation of nano‑ripple structures and microstructures on silicon surface at pulse number of 60[97]; (b) evolution of silica internal structure with pulse number and formation of nano‑ripple structures[99]
    • Table 1. Performance comparison of various modeling methods

      View table

      Table 1. Performance comparison of various modeling methods

      Modeling methodResultApplicationSpatial scaleTime scaleMaterialCalculation
      Real-time time-dependent density functional theory(rt-TDDFT)Photon-electron-ion diabatic evolutionDecomposition of moleculesAtomic scaleas‒fsMainly for moleculesVery large
      Ab initio molecular dynamics simulation based on electron excitationElectron-ion coupling processNonthermal phase transition modeling in crystalline materialsAtomic scalefs‒psSuitable for any materialVery large
      Two-temperature equationSimplified photon-electron-ion coupling process(refers to temperature,not the process of etching)Only computation of electron/lattice temperaturenm‒μmfs‒psMainly for metalLow
      Electron excitation equation and two-temperature coupling modelSimplified photon-electron coupling process(refers to excited electron density,not the process of etching)Only computation of electron/lattice temperature and excited electron densitynm‒μmfs‒psSuitable for semiconductor or dielectricLow
      Two-temperature and molecular dynamics coupling modelSimplified photon-electron-ion coupling process(ablation,deposition and splatter)Partial ablation area much less than the spot sizenmfs‒nsMainly for metalLarge
      Two-temperature and fluid mechanics coupling modelSimplified photon-electron-ion coupling process(ablation,phase transitions and fluid dynamic)Formation of the microstructures considering the spot sizenm‒μmfs‒μsMainly for metalMedium
      Electron excitation equation,two-temperature and fluid mechanics coupling modelSimplified photon-electron-ion coupling process(ablation,phase transitions and fluid dynamic)Formation of the microstructures considering the spot sizenm‒μmfs‒μsSuitable for semiconductor or dielectricMedium
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    Wenjun Wang, Aifei Pan, Xuesong Mei. Review of Multi‑Scale Theoretical Research on Ultrashort Laser Processing and Coupling Model Construction (Invited)[J]. Chinese Journal of Lasers, 2024, 51(4): 0402407

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    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: Nov. 1, 2023

    Accepted: Jan. 2, 2024

    Published Online: Feb. 19, 2024

    The Author Email: Wang Wenjun (wenjunwang@mail.xjtu.edu.cn)

    DOI:10.3788/CJL231352

    CSTR:32183.14.CJL231352

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