Optics and Precision Engineering, Volume. 32, Issue 9, 1384(2024)

Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching

Feier LI1,2, Jiajia YU1,2, Liqun DU1,2, Mengxi WU1,2、*, and Junshan LIU1,2、*
Author Affiliations
  • 1State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, Dalian6024, China
  • 2Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian11604, China
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    Figures & Tables(11)
    Schematic analysis of effect of interfacial erosion on etching topography
    Schematic of cellular automata model and evolution rules with interfacial erosion included
    Numerical simulation results of glass wet etching
    SEM images of cross-section morphology of glasses after wet etching
    Comparison of experimental data and numerical simulation in terms
    Cross-section SEM images of borosilicate glass after wet etching
    SEM images of microstructure produced using quasi-anisotropic wet etching on borosilicate glass
    SEM images of glass microprism arrays with different geometries
    Characterization of light diffusion using microprism arrays
    • Table 1. Fitting equation between simulation parameters and experimental settings

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      Table 1. Fitting equation between simulation parameters and experimental settings

      Counterpart relationshipFitted relational equation
      Number of cycles n and etching time tn=6t
      Etching probability PG and etchant concentration cPG=-0.643e-c/0.198+0.737
      Interfacial erosion probability PI and PGPI=1.338PG
    • Table 2. Dimensional deviations between experimental and design data

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      Table 2. Dimensional deviations between experimental and design data

      Microprism arrayLHL'H'δLδH
      Triangular pyramid17.322.316.63±0.1882.29±0.030-0.877-0.040
      Quadrangular pyramid102.39.37 ±0.2552.29±0.033-0.855-0.043
      Hexagonal pyramid5.772.35.14 ±0.1882.29±0.035-0.818-0.045
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    Feier LI, Jiajia YU, Liqun DU, Mengxi WU, Junshan LIU. Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching[J]. Optics and Precision Engineering, 2024, 32(9): 1384

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    Paper Information

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    Received: Jan. 11, 2024

    Accepted: --

    Published Online: Jun. 2, 2024

    The Author Email: Mengxi WU (liujs@dlut.edu.cn), Junshan LIU (liujs@dlut.edu.cn)

    DOI:10.37188/OPE.20243209.1384

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