Optics and Precision Engineering, Volume. 32, Issue 9, 1384(2024)

Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching

Feier LI1,2, Jiajia YU1,2, Liqun DU1,2, Mengxi WU1,2、*, and Junshan LIU1,2、*
Author Affiliations
  • 1State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, Dalian6024, China
  • 2Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian11604, China
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    Microprism arrays are extensively utilized across various industries. Glass-based microprisms, in comparison to polymers, offer superior corrosion resistance, thermal stability, and durability. However, the isotropic nature of glass makes micromachining into prism-like structures challenging. In this paper, we introduce a novel interfacial erosion-induced quasi-anisotropic wet etching technique to manufacture glass microprism arrays efficiently and cost-effectively. For the first time, interfacial erosion is analyzed within a metacellular automaton to study the wet etching process, uncovering the dynamics between side etching and interfacial erosion and their impact on the side wall profiles. This approach yields varied microstructures with tilted morphologies. Leveraging quasi-anisotropic etching characteristics, we successfully produce microprism arrays with adjustable spacing, shape, and size, achieving 98% repeatability between arrays. Our method significantly enhances LED lamp diffusion, increasing average brightness by 4.6 times. This research not only pioneers a new direction in glass wet etching but also incorporates quasi-anisotropic properties into the traditional isotropic framework, presenting a straightforward, economical technique for fabricating glass microprism arrays and similar devices.

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    Feier LI, Jiajia YU, Liqun DU, Mengxi WU, Junshan LIU. Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching[J]. Optics and Precision Engineering, 2024, 32(9): 1384

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    Paper Information

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    Received: Jan. 11, 2024

    Accepted: --

    Published Online: Jun. 2, 2024

    The Author Email: Mengxi WU (liujs@dlut.edu.cn), Junshan LIU (liujs@dlut.edu.cn)

    DOI:10.37188/OPE.20243209.1384

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